• Laser & Optoelectronics Progress
  • Vol. 57, Issue 15, 153004 (2020)
Hui Zhong*
Author Affiliations
  • Key Laboratory for Advanced Optical Remote Sensing Technology of Beijing, Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China
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    DOI: 10.3788/LOP57.153004 Cite this Article Set citation alerts
    Hui Zhong. Design and Analysis of Micro-Spectrometer with High Resolution and Wide Spectral Range[J]. Laser & Optoelectronics Progress, 2020, 57(15): 153004 Copy Citation Text show less
    Principle of F-P interferometer
    Fig. 1. Principle of F-P interferometer
    Spectral transmittance curve of F-P interferometer
    Fig. 2. Spectral transmittance curve of F-P interferometer
    Schematic diagram of micro-spectrometer
    Fig. 3. Schematic diagram of micro-spectrometer
    Curved grating spectrometer. (a) Structure diagram; (b) spot diagram
    Fig. 4. Curved grating spectrometer. (a) Structure diagram; (b) spot diagram
    Optical system structure of micro-spectrometer
    Fig. 5. Optical system structure of micro-spectrometer
    Single scan of a wide band light source. (a) Spot diagram; (b) spectral diagram
    Fig. 6. Single scan of a wide band light source. (a) Spot diagram; (b) spectral diagram
    Output spectrum of F-P interferometer
    Fig. 7. Output spectrum of F-P interferometer
    Reconstructed Raman spectral of Benzonitrile
    Fig. 8. Reconstructed Raman spectral of Benzonitrile
    ParameterATR6600ATR3100Mira M-2NanoRamProgeny
    ManufacturerOptoskyOptoskyMetrohmB&WTEKRigaku
    Spectral range /cm-1200-2800250-2400400-2300200-2400200-2500
    Spectral resolution /cm-110-161012-14108-11
    Size /mm×mm×mm225×110×50300×225×132144×83×64250×110×60299×81×74
    Weight /g1200350082015451500
    Sensor size /mm12.825.612.812.812.8
    Table 1. Technical parameters of mainstream Raman spectrometers
    ParameterValue
    spectral range /cm-1150-3200
    spectral resolution /cm-1≤6
    NA0.22
    F-P finesse38
    F-P XFSR /cm-1227.3-221.5
    F-P clear aperture /mm3
    grating spectrometerspectral resolution /nm≤20
    R1 /mm31.3
    R2 /mm5.32
    R3 /mm10
    h /μm22-22.57
    narrow hole aperture /μm50
    grating groove /mm2400
    image size /mm2.4
    Table 2. Specific parameters of micro-spectrometer
    ASTMpeaks /cm-1Reconstructedpeaks /cm-1ASTMrelativeintensityReconstructedrelativeintensity
    460.9459.91510
    548.5548.977
    751.3751.0109
    767.1768.01010
    1000.71000.9100100
    1026.61027.51310
    1177.91178.12017
    1192.61192.72521
    1598.91598.23630
    2229.42230.06763
    3072.33072.22619
    Table 3. Reconstructed peaks versus ASTM standards of Benzonitrile
    Hui Zhong. Design and Analysis of Micro-Spectrometer with High Resolution and Wide Spectral Range[J]. Laser & Optoelectronics Progress, 2020, 57(15): 153004
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