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Journals >
Acta Optica Sinica >
Volume 35 >
Issue 3 >
Page 322007 > Article
Acta Optica Sinica
Vol. 35, Issue 3, 322007 (2015)
Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing
Bai Yang
1、2、*
, Zhang Feng
1
, Li Longxiang
1、2
, Zheng Ligong
1
, and Zhang Xuejun
1
Author Affiliations
1
[in Chinese]
2
[in Chinese]
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DOI:
10.3788/aos201535.0322007
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Bai Yang, Zhang Feng, Li Longxiang, Zheng Ligong, Zhang Xuejun. Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing[J]. Acta Optica Sinica, 2015, 35(3): 322007
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Bai Yang, Zhang Feng, Li Longxiang, Zheng Ligong, Zhang Xuejun. Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing[J]. Acta Optica Sinica, 2015, 35(3): 322007
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Paper Information
Category: Optical Design and Fabrication
Received: Sep. 15, 2014
Accepted: --
Published Online: --
The Author Email: Yang Bai (baiyang5406@sina.com)
DOI:
10.3788/aos201535.0322007
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