Fabrication of Large Size 1064 nm HfO2/SiO2 Narrow-Band Filters with High Laser Damage Threshold

Wu Xiaoming; Li Xin; Wang Yijian; Jiao Hongfei

doi:10.3788/lop53.042302

[1] Wang Juntao, Wang Xiaojun, Zhou Tangjian, et al.. Design of end-pumped double cladding Nd∶YAG planar waveguide laser amplifier[J]. Chinese J Lasers, 2015, 42(1): 0102009.

[2] Gu Peifu, Bai Shengyuan, Li Haifeng, et al.. Design of DWDM thin-film interference filters[J]. Acta Optica Sinica, 2002, 22 (7): 794-797.

[3] H A Macleod. Thin-Film Optical Filters[M]. Beijing: National Defense Industry Press, 1974: 318-345.

[4] R Chow, S Falabella, G E Loomis, et al.. Reactive evaporation of low-defect density hafnia[J]. Applied Optics, 1993, 32(18): 5567-5574.

[5] Hongfei Jiao, Xinbin Cheng, Yongli Liu, et al.. Effects of substrate temperatures on the structure and properties of hafnium dioxide films[J]. Applied Optics, 2011, 50(9): C309-15.

[6] J M Khoshman, A Khan, M E Kordesch. Amorphous hafnium oxide thin films for antireflection optical coatings[J]. Surface & Coatings Technology, 2008, 202(11): 2500-2502.

[7] M Alvisi, F De Tomasi, M R Perrone, et al.. Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films[J]. Thin Solid Films, 2001, 396(1-2): 44-52.

[8] J Khoshman, M Kordesch. Optical properties of a-HfO2 thin films[J]. Surface & Coatings Technology, 2006, 201(6): 3530- 3535.

[9] J P Lehan, Y Mao, B G Bovard, et al.. Optical and micro-structural properties of hafnium dioxide thin films[J]. Thin Solid Films, 1991, 203(2): 227-250.

[10] Hongfei Jiao, Xinbin Cheng, Ganghua Bao, et al.. Study of the HfO2/SiO2 dichroic laser mirrors having refractive index inhomogeneity[J]. Applied Optics, 2014, 53(4): A56-A61.

[11] Christopher J Stolz, Michael D Thomas, Andrew J Griffin. BDS thin film damage competition[C]. SPIE, 2008, 7132: 71320C.

[12] Christopher J Stolz, Mark Caputo, Andrew J Griffin, et al.. 1064-nm Fabry-Perot transmission filter laser damage competition [C]. SPIE, 2014, 9237: 92370N.

[13] Haiyang Hu, Zhengxiu Fan, Fu Luo. Laser-induced damage of a 1064-nm ZnS/MgF2 narrow-band interference filter[J]. Applied Optics, 2001, 40(12): 1950-1956.

[14] Hongfei Jiao, Tao Ding, Xinbin Cheng, et al.. Study of a narrowband reflection filter with multi- channels[J]. Chinese Optics Letters, 2010, 8(11): 1102-1105.

[15] S C Weakley, Christopher J Stolz, Zhouling Wu, et al.. Role of starting material composition in interfacial damage morphology of hafnia-silica multilayer coatings[C]. SPIE, 1998, 3578: 137.

[16] Wang Zhanshan, Bao Ganghua, Jiao Hongfei, et al.. Interfacial damage in a Ta2O5/SiO2 double cavity filter irradiated by 1064 nm nanosecond laser pulses[J]. Applied Optics, 2013, 21(25): 30623-30632.