• Acta Optica Sinica
  • Vol. 30, Issue 1, 1 (2010)
Fan Muwen1、2、*, Deng Jianming1、2, Zhou Rui1、2, and Li Mei1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos20103001.0001 Cite this Article Set citation alerts
    Fan Muwen, Deng Jianming, Zhou Rui, Li Mei. The Design and Performance Test of the Force Actuator Developed for the Active Mirror[J]. Acta Optica Sinica, 2010, 30(1): 1 Copy Citation Text show less

    Abstract

    The force actuator developed for the active mirror uses DC-motor as driving source. Nanometer micro-displacement driving is achieved by means of gearbox,ball-screw-driven stage and groups of springs. Self-locking is performed by leading screw pair. The high gain PID controller based on pull-push force sensor in the feedback path can provide a sufficiently high loop gain to suppress effect of friction on micro-dynamic characteristics so that an excellent linearity is achieved. The actuators were tested in an active mirror prototype with four same actuators and three rigid supports. The measurement of micro-displacement was tested by an optical interferometer. The results of the prototype show that the average displacement resolution is 10 nm,max stroke is ±8 μm,max driving force is ±700 N. The experimental results show that the force actuator is suitable to drive an active mirror. This also provides basis for further optimization of actuator developed for active mirror.
    Fan Muwen, Deng Jianming, Zhou Rui, Li Mei. The Design and Performance Test of the Force Actuator Developed for the Active Mirror[J]. Acta Optica Sinica, 2010, 30(1): 1
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