• Acta Physica Sinica
  • Vol. 69, Issue 7, 077302-1 (2020)
Nai-Zhang Liu, Xue-Bing Zhang, and Ruo-He Yao*
Author Affiliations
  • School of Electronics and Information Technology, South China University of Technology, Guangzhou 510640, China
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    DOI: 10.7498/aps.69.20191931 Cite this Article
    Nai-Zhang Liu, Xue-Bing Zhang, Ruo-He Yao. The physics-based model of AlGaN/GaN high electron mobility transistor outer fringing capacitances[J]. Acta Physica Sinica, 2020, 69(7): 077302-1 Copy Citation Text show less
    Schematic of GaN HEMT outer fringing capacitances in different state: (a) In the OFF-state; (b) in the ON-state.
    Fig. 1. Schematic of GaN HEMT outer fringing capacitances in different state: (a) In the OFF-state; (b) in the ON-state.
    Schematic of normal electric field between the side wall of the gate and the 2DEG.
    Fig. 2. Schematic of normal electric field between the side wall of the gate and the 2DEG.
    (a) Electric field lines after transforming the nonconfocal elliptical system to the confocal system; (b) the confocal system with Lcd = Ld.
    Fig. 3. (a) Electric field lines after transforming the nonconfocal elliptical system to the confocal system; (b) the confocal system with Lcd = Ld.
    Error in the confocal system with Lcd = Ld.
    Fig. 4. Error in the confocal system with Lcd = Ld.
    Cofd versus the extended depletion length induced by donor-like surface traps.
    Fig. 5. Cofd versus the extended depletion length induced by donor-like surface traps.
    The curve of the density ns of 2DEG and Ef versus Vg
    Fig. 6. The curve of the density ns of 2DEG and Ef versus Vg
    The curve of Vdsat versus Vg.
    Fig. 7. The curve of Vdsat versus Vg.
    The curve of Cofd versus Vds obtained from the traditional model and the model in this paper.
    Fig. 8. The curve of Cofd versus Vds obtained from the traditional model and the model in this paper.
    The curve ofCofd versus Vth(The illustration show the curve of Vth with Al component and doped concentration).
    Fig. 9. The curve ofCofd versus Vth(The illustration show the curve of Vth with Al component and doped concentration).
    The curve of Cofd versus T
    Fig. 10. The curve of Cofd versus T
    The curve oftemperature sensitivity of Cofd under different drain bias.
    Fig. 11. The curve oftemperature sensitivity of Cofd under different drain bias.
    参数定义数值
    εx有效介电常数7.65ε0
    Esat/V·μm–1饱和电场15
    Ld/μm 漏端沟道长度1
    Tg/μm 栅极厚度0.3
    TAlGaN/nm AlGaN层厚度22
    $ E_{\rm g}^{\rm AIN} $/eV AIN禁带宽度6.13
    $ E_{\rm g}^{\rm GaN} $/eV GaN禁带宽度3.42
    VtempVth的依赖系数温度 0.1689
    TNOM/K 器件温标300
    ξ1拟合参数1.1
    ξ2拟合参数0.24
    m拟合参数1.2
    p拟合参数0.307
    τ拟合参数3.2
    a拟合参数1.497
    b拟合参数1.9
    c拟合参数0.31
    Table 1. Model parameters in this paper.
    Nai-Zhang Liu, Xue-Bing Zhang, Ruo-He Yao. The physics-based model of AlGaN/GaN high electron mobility transistor outer fringing capacitances[J]. Acta Physica Sinica, 2020, 69(7): 077302-1
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