For high pass filter in terahertz frequency range, a laboratory preparation process of subwavelength structure sample on polyethylene terephthalate film coated with aluminum layer using photolithography process is described. The influence of subwavelength rectangular metal hole array structure on the transmission properties of terahertz wave is mainly studied, and the high-pass filter characteristics of this structure are analyzed theoretically by using simulation software. The influence of hole size and metal line width of the rectangular hole structure on the high-pass filtering effect is numerically analyzed, and the corresponding mathematical model is established.