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    Journals >Acta Optica Sinica >Volume 31 >Issue 11 >Page 1122003 > Article
    • Acta Optica Sinica
    • Vol. 31, Issue 11, 1122003 (2011)
    Magnification Tolerancing and Compensation for the Lithographic Projection Lens
    Xu Weicai1、2、*, Huang Wei1, and Yang Wang1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201131.1122003 Cite this Article Set citation alerts
    Xu Weicai, Huang Wei, Yang Wang. Magnification Tolerancing and Compensation for the Lithographic Projection Lens[J]. Acta Optica Sinica, 2011, 31(11): 1122003 Copy Citation Text show less
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    Xu Weicai, Huang Wei, Yang Wang. Magnification Tolerancing and Compensation for the Lithographic Projection Lens[J]. Acta Optica Sinica, 2011, 31(11): 1122003
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