Mengke Zheng, Jie Li, Rongzhu Zhang, Liqun Chai. Analysis and Simulation on Damage Characteristics of Multilayer Optical Film by Pulsed Laser[J]. Acta Optica Sinica, 2022, 42(1): 0131001
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- Acta Optica Sinica
- Vol. 42, Issue 1, 0131001 (2022)
Fig. 1. Analysis model of multilayer film irradiated by laser
Fig. 2. Standing wave field distribution in multilayers
Fig. 3. Temperature distribution in film under incidence of pulse with pulse width of 10 ns. (a) Temperature at center of film; (b) curve of temperature peak with time
Fig. 4. Spatial distribution of stress field in film under incidence of pulse with pulse width of 10 ns. (a) Radial stress; (b) annular stress; (c) axial stress
Fig. 5. Maximum stress field distribution of film under incidence of pulse with pulse width of 10 ns. (a) HfO2 film layer; (b) SiO2 film layer
Fig. 6. Change of photon ionization rate in film under incidence of pulse with pulse width of 10 ns. (a) Avalanche ionization rate; (b) multiphoton ionization rate
Fig. 7. Free electron density distribution curve in film under incidence of pulse with pulse width of 10 ns
Fig. 8. Temperature distribution in film under incidence of pulse with laser energy density of 8 J/cm2. (a) Temperature at center of film; (b) curve of temperature peak with time
Fig. 9. Spatial distribution of stress field in film under incidence of pulse with laser energy density of 8 J/cm2. (a) Radial stress; (b) annular stress; (c) axial stress
Fig. 10. Maximum stress field distribution of film under incidence of pulse with laser energy density of 8 J/cm2. (a) HfO2 film layer; (b) SiO2 film layer
Fig. 11. Free electron density distribution curve in film under incidence of pulse with laser energy density of 8 J/cm2
Fig. 12. Change curves of membrane damage threshold with pulse width
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Table 1. Thermodynamic parameters of thin film materials
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Table 2. Physical parameters of thin film materials
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Table 3. Film damage characteristics under different pulse widths
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Table 4. Film damage characteristics under different energy density
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