[1] Giansanti D, Maccioni G, Macellari V. The development and test of a device for the reconstruction of 3-D position and orientation by means of a kinematic sensor assembly with rate gyroscopes and accelerometers[J]. IEEE Trans. on Biomedical Engin., 2005, 52(7): 1271-1277.

[2] Yazdi N, Ayazi F, Najafi K. Micromachined inertial sensors[J]. Proc. of IEEE, 1998, 86(8): 1640-1659.

[3] Liu J, Shi Y, Zhang W. Micro inertial measurement unit based integrated velocity strapdown testing system[J]. Sensors & Actuators A: Physical, 2004, 112(1): 44-48.

[4] Ayazi F. Multi-dof inertial MEMS: From gaming to dead reckoning[C]// Proc. of IEEE Solid-State Sensors, Actuators and Microsystems Conf., 2011: 2805-2808.

[5] Chae J, Kulah H, Najafi K. A monolithic three-axis micro-G micromachined silicon capacitive accelerometer[J]. J. of Microelectromechanical Systems, 2005, 14(2): 235-242.

[7] Efimovskaya A, Lin Y W, Shkel A M. Origami-like 3-D folded MEMS approach for miniature inertial measurement unit[J]. J. of Microelectromechanical Systems, 2017, 26(5): 1-10.

[8] Dellea S, Giacci F, Longoni A, et al. Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors[C]// Proc. of IEEE Inter. Conf. on Micro Electro Mechanical Systems, 2015.