LI Zhiwei, ZHANG Weiping, GU Liutao. Design and Fabrication of 3D MEMS Foldable System for Micro-IMU[J]. Semiconductor Optoelectronics, 2021, 42(1): 61

Search by keywords or author
- Semiconductor Optoelectronics
- Vol. 42, Issue 1, 61 (2021)
Abstract

Set citation alerts for the article
Please enter your email address