Analysis and correction of image distortion in MEMS galvanometer scanning confocal system

Xin Miao; Hangfeng Li; Yunhai Zhang; Famin Wang; Xin Shi

doi:10.3788/IRLA20200206

Journals >Infrared and Laser Engineering >Volume 50 >Issue 2 >Page 20200206 > Article

Infrared and Laser Engineering
Vol. 50, Issue 2, 20200206 (2021)

Analysis and correction of image distortion in MEMS galvanometer scanning confocal system

Xin Miao^1、2, Hangfeng Li¹, Yunhai Zhang^1、2, Famin Wang^1、2, and Xin Shi³

Author Affiliations

¹University of Science and Technology of China, Hefei 230026, China

²Jiangsu Key Laboratory of Medical Optics, Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou 215163, China

³The Second Affiliated Hospital of Soochow University, Suzhou 215000, China

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DOI: 10.3788/IRLA20200206 Cite this Article

Xin Miao, Hangfeng Li, Yunhai Zhang, Famin Wang, Xin Shi. Analysis and correction of image distortion in MEMS galvanometer scanning confocal system[J]. Infrared and Laser Engineering, 2021, 50(2): 20200206 Copy Citation Text

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References

[5] Caiming Liu. Study on the working principle and image distortion of galvanometer scanning in laser large screen display system. Chinese Journal of Lasers, 12, 263-266(2003).

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