• Optics and Precision Engineering
  • Vol. 32, Issue 3, 366 (2024)
Xiaoguang WANG, Qiuling WEN*, Jinhong CHEN, Guoqin HUANG..., Changcai CUI and Feng JIANG|Show fewer author(s)
Author Affiliations
  • Institute of Manufacturing Engineering, Huaqiao University, Xiamen361021, China
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    DOI: 10.37188/OPE.20243203.0366 Cite this Article
    Xiaoguang WANG, Qiuling WEN, Jinhong CHEN, Guoqin HUANG, Changcai CUI, Feng JIANG. Laser-induced plasma-assisted ablation of sapphire microstructures and their wettability[J]. Optics and Precision Engineering, 2024, 32(3): 366 Copy Citation Text show less
    Schematic diagram of LIPAA experimental setup for sapphirp
    Fig. 1. Schematic diagram of LIPAA experimental setup for sapphirp
    LIPAA processing experiment setup
    Fig. 2. LIPAA processing experiment setup
    Schematic diagram of distance h between field lens and target
    Fig. 3. Schematic diagram of distance h between field lens and target
    SEM images of morphologies of sapphire microgrooves at different distances between field mirror and target
    Fig. 4. SEM images of morphologies of sapphire microgrooves at different distances between field mirror and target
    Dependence of width (a) and depth (b) of sapphire microgrooves on distance between field mirror and target
    Fig. 5. Dependence of width (a) and depth (b) of sapphire microgrooves on distance between field mirror and target
    SEM images of morphologies of sapphire microgrooves at different laser powers
    Fig. 6. SEM images of morphologies of sapphire microgrooves at different laser powers
    Relationship of width (a) and depth (b) of sapphire microgroove with laser power respectively
    Fig. 7. Relationship of width (a) and depth (b) of sapphire microgroove with laser power respectively
    Evolution of surface morphologies of sapphire microgrooves with target-to-sapphire distance
    Fig. 8. Evolution of surface morphologies of sapphire microgrooves with target-to-sapphire distance
    Width (a) and depth (b) of sapphire microgrooves as function of target-to-sapphire distance
    Fig. 9. Width (a) and depth (b) of sapphire microgrooves as function of target-to-sapphire distance
    SEM images of morphologies of sapphire microgrooves at different scanning speeds
    Fig. 10. SEM images of morphologies of sapphire microgrooves at different scanning speeds
    Width (a) and depth (b) of sapphire microgrooves as function of scanning speed
    Fig. 11. Width (a) and depth (b) of sapphire microgrooves as function of scanning speed
    (a) Schematic diagram of contact angle and (b) Contact angle of original surface of sapphire
    Fig. 12. (a) Schematic diagram of contact angle and (b) Contact angle of original surface of sapphire
    Surface morphologies and the corresponding contact angles of sapphire microstructures
    Fig. 13. Surface morphologies and the corresponding contact angles of sapphire microstructures
    Surface contact angles and corresponding surface micro-morphology of optimal hydrophobic and hydrophilic structures of sapphire
    Fig. 14. Surface contact angles and corresponding surface micro-morphology of optimal hydrophobic and hydrophilic structures of sapphire
    EDS analysis of LIPAA-processed sapphire microstructures
    Fig. 15. EDS analysis of LIPAA-processed sapphire microstructures
    水平

    激光能量

    密度/(J·cm-2

    线间距/μm靶材和蓝宝石之间的距离/μm速度/(mm·s-1
    14.9502001
    26.31001505
    37.415010010
    48.02005020
    Table 1. Factors and their corresponding levels
    试验激光能量密度扫描线间距靶材和蓝宝石之间的距离扫描速度空列
    111111
    212222
    313333
    414444
    521234
    622143
    723412
    824321
    931342
    1032431
    1133124
    1234213
    1341423
    1442314
    1543241
    1644132
    Table 2. Orthogonal experiment design
    试验

    激光能量密度

    /(J·cm-2

    扫描线间距/μm靶材和蓝宝石之间的距离/μm速度/(mm·s-1空列结果接触角/(°)
    14.9502001170.5
    24.910015052102.0
    34.9150100103108.0
    44.920050204100.0
    56.350150104108.0
    66.3100200203120.5
    76.31505012103.5
    86.320010051110.0
    97.45010020244.5
    107.41005010196.0
    117.415020054103.5
    127.420015013134.0
    138.050505366.0
    148.010010014121.5
    158.0150150201126.0
    168.0200200102126.5
    Table 3. Measurement results of sapphire contact angle based on orthogonal test
    ABCD
    K1380.5291421429.5
    K2442440470383.5
    K3378441384387
    K4440470.5433391
    k195.172.8105.3107.4
    k2110.5110117.595.9
    k394.5110.39696.8
    k4110117.6108.397.8
    极差R1644.821.511.5
    因数主→次B C A D
    Table 4. Range analysis of the contact angle
    Xiaoguang WANG, Qiuling WEN, Jinhong CHEN, Guoqin HUANG, Changcai CUI, Feng JIANG. Laser-induced plasma-assisted ablation of sapphire microstructures and their wettability[J]. Optics and Precision Engineering, 2024, 32(3): 366
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