• Infrared and Laser Engineering
  • Vol. 53, Issue 6, 20240124 (2024)
Wanqi ZHAO1,2,3, Rui JIANG3, Zebin FENG1,3, Ze XU3..., Ning GUO3, Yan JIANG1 and Jingguo ZHU1|Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing RSLaser Opto-Electronics Technology Co. Ltd., Beijing 100176, China
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    DOI: 10.3788/IRLA20240124 Cite this Article
    Wanqi ZHAO, Rui JIANG, Zebin FENG, Ze XU, Ning GUO, Yan JIANG, Jingguo ZHU. Design and implementation of high precision on-line measurement system for pulse parameters of ArF Excimer laser[J]. Infrared and Laser Engineering, 2024, 53(6): 20240124 Copy Citation Text show less
    The excimer laser energy closed-loop control system
    Fig. 1. The excimer laser energy closed-loop control system
    Ideal single pulse power density curve
    Fig. 2. Ideal single pulse power density curve
    Overall design of energy measurement system
    Fig. 3. Overall design of energy measurement system
    Design of front-end light path system
    Fig. 4. Design of front-end light path system
    Schematic diagram of measurement circuit
    Fig. 5. Schematic diagram of measurement circuit
    Simplified circuit diagram for peak holding
    Fig. 6. Simplified circuit diagram for peak holding
    Peak holding equivalent circuit diagram
    Fig. 7. Peak holding equivalent circuit diagram
    Simulation pulse waveform
    Fig. 8. Simulation pulse waveform
    Peak voltage acquisition process
    Fig. 9. Peak voltage acquisition process
    Pulse and Burst counting processes in 1 Burst
    Fig. 10. Pulse and Burst counting processes in 1 Burst
    The repetition frequency waveform of the laser measured when laser works at 6 kHz
    Fig. 11. The repetition frequency waveform of the laser measured when laser works at 6 kHz
    Measurement system for pulse parameters output waveform when laser works at 6 kHz
    Fig. 12. Measurement system for pulse parameters output waveform when laser works at 6 kHz
    Comparision between the reference value and measured value when the pulse energy of the laser is set as 7 mJ
    Fig. 13. Comparision between the reference value and measured value when the pulse energy of the laser is set as 7 mJ
    Fitting curve of energy and output voltage
    Fig. 14. Fitting curve of energy and output voltage
    Energy setting/mJStandard energy meterMeasurement system for pulse parameters
    Mean/mJSD/mJRSDMean/mJSD/mJRSD
    66.020.1392.30%5.990.1302.17%
    77.040.1792.55%7.040.1802.56%
    88.050.2102.61%8.020.2342.99%
    99.070.0941.03%9.100.1241.37%
    1010.090.1171.16%10.090.1541.53%
    1111.110.1141.03%11.120.1421.28%
    1212.120.1281.06%12.130.1291.07%
    Table 1. Comparison between the measured values of the measurement system and the standard energy meter
    Wanqi ZHAO, Rui JIANG, Zebin FENG, Ze XU, Ning GUO, Yan JIANG, Jingguo ZHU. Design and implementation of high precision on-line measurement system for pulse parameters of ArF Excimer laser[J]. Infrared and Laser Engineering, 2024, 53(6): 20240124
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