Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition

[1] K. Robbie, G. Beydaghyan, T. Brown, C. Dean, J. Adams, and C. Buzea, Rev. Sci. Instrum. 75, 1089 (2004).

[2] J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nature Photon. 1, 176 (2007).

[3] A. C. van Popta, M. H. Hawkeye, J. C. Sit, and M. J. Brett, Opt. Lett. 29, 2545 (2004).

[4] K. Kaminska, T. Brown, G. Beydaghyan, and K. Robbie, Appl. Opt. 42, 4212 (2003).

[5] Q. Zhou, Z. Li, Y. Yang, and Z. Zhang, J. Phys. D 41, 152007 (2008).

[6] R. A. Tripp, R. A. Dluhy, and Y. Zhao, Nanotoday 3, (3-4) 31 (2008).

[7] A. K. Kalkan, M. R. Henry, H. Li, J. D. Cuiffi, D. J. Hayes, C. Palmer, and S. J. Fonash, Nanotechnol. 16, 1383 (2005).

[8] H. Kimura, J. Mizuki, S. Kamiyama, and H. Suzuki, Appl. Phys. Lett. 66, 2209 (1995).

[9] E. Atanassova, N. Stojadinovic, A. Paskaleva, D. Spassov, L. Vracar, and M. Georgieva, Semicond. Sci. Technol. 23, 075017 (2008).

[10] M. Matsui, H. Nagayoshi, G. Muto, S. Tanimoto, K. Kuroiwa, and J. Tarui, Jpn. J. Appl. Phys. 29, 62 (1990).

[11] P. Kofstad, J. Electrochem. Soc. 109, 776 (1962).

[12] J. D. T. Kruschwitz and W. T. Pawlewicz, Appl. Opt. 36, 2157 (1997).

[13] F. Rubio, J. Denis, J. M. Albella, and J. M. Martinez-Duart, Thin Solid Films 90, 405 (1982).

[14] C. Xu, H. Dong, Q. Xiao, J. Ma, Y. Jin, and J. Shao, Chinese J. Lasers (in Chinese) 35, 1595 (2008).

[15] X. He, J. Wu, L. Zhao, J. Meng, X. Gao, and X. Li, Solid State Commun. 147, 90 (2008).

[16] S. Wang, X. Fu, G. Xia, J. Wang, J. Shao, and Z. Fan, Appl. Surf. Sci. 252, 8734 (2006).

[17] J. Ni, Y. Zhu, Q. Zhou, and Z. Zhang, J. Am. Ceram. Soc. 91, 3458 (2008).

[18] R. Messier, V. C. Venugopal, and P. D. Sunal, J. Vac. Sci. Technol. A 18, 1538 (2000).

[19] J. A. Thornton, Annu. Rev. Mater. Sci. 7, 239 (1977).

[20] B. Dick and M. J. Brett, in Encyclopedia of Nanoscience and Nanotechnology. vol. 6 (American Scientific Publishers, Valencia, 2004) pp. 703-725.

[21] J. M. Nieuwenhuizen and H. B. Haanstra, Philips Tech. Rev. 27, 87 (1966).

[22] R. N. Tait, T. Smy, and M. J. Brett, Thin Solid Films 226, 196 (1993).

[23] Y. Wang, W. Zhang, Z. Fan, J. Huang, Y. Jin, J. Yao, and J. Shao, Chinese J. Lasers (in Chinese) 35, 760 (2008).

[24] V. Janicki, J. Sancho-Parramon, and H. Zorc, Thin Solid Films 516, 3368 (2008).

[25] G. Beydaghyan, K. Kaminska, T. Brown, and K. Robbie, Appl. Opt. 43, 5343 (2004).

[26] J. Wang, J. Shao, and Z. Fan, Opt. Commun. 247, 107 (2005).

CLP Journals