Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition

Xiudi Xiao; Guoping Dong; Hongbo He; Hongji Qi; Zhengxiu Fan; Jianda Shao

doi:10.3788/COL20090710.0967

Journals >Chinese Optics Letters >Volume 7 >Issue 10 >Page 967 > Article

Chinese Optics Letters
Vol. 7, Issue 10, 967 (2009)

Optical properties and microstructure of Ta₂O₅ thin films prepared by oblique angle deposition

Xiudi Xiao^1、2, Guoping Dong^1、2, Hongbo He¹, Hongji Qi^1、3, Zhengxiu Fan¹, and Jianda Shao¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Graduate University of Chinese Academy of Sciences, Beijing 100049, China

³Shanghai Daheng Optics and Fine Mechanics Co., Ltd., Shanghai 201800, China

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DOI: 10.3788/COL20090710.0967 Cite this Article Set citation alerts

Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, Jianda Shao. Optical properties and microstructure of Ta₂O₅ thin films prepared by oblique angle deposition[J]. Chinese Optics Letters, 2009, 7(10): 967 Copy Citation Text

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