Amplitude gradient-based metasurfaces for off-chip terahertz wavefront shaping

Wen Lyu; Jianzhi Huang; Shengqi Yin; Xukang Wang; Jiaming Liu; Xu Fang; Hua Geng

doi:10.1364/PRJ.496366

[1] R. Wang, Q. Wu, W. Cai, Q. Zhang, H. Xiong, B. Zhang, J. Qi, J. Yao, J. Xu. Broadband on-chip terahertz asymmetric waveguiding via phase-gradient metasurface. ACS Photon., 6, 1774-1779(2019).

[2] L. F. Herrán, A. Algaba Brazalez, E. Rajo-Iglesias. Ka-band planar slotted waveguide array based on groove gap waveguide technology with a glide-symmetric holey metasurface. Sci. Rep., 11, 8697(2021).

[3] Y. Ding, X. Chen, Y. Duan, H. Huang, L. Zhang, S. Chang, X. Guo, X. Ni. Metasurface-dressed two-dimensional on-chip waveguide for free-space light field manipulation. ACS Photon., 9, 398-404(2022).

[4] J. He, M. Wan, X. Zhang, S. Yuan, L. Zhang, J. Wang. Generating ultraviolet perfect vortex beams using a high-efficiency broadband dielectric metasurface. Opt. Express, 30, 4806-4816(2022).

[5] Y. Kan, R. Yang, A. Zhang, Z. Lei, Y. Jiao, J. Li. Meta-surface cavity-based waveguide slot array for dual-circularly polarized dual beam. IEEE Trans. Anntenas Propag., 70, 3894-3898(2022).

[6] Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, X. Wang. Efficient silicon metasurfaces for visible light. ACS Photon., 4, 544-551(2017).

[7] F. He, K. F. MacDonald, X. Fang. Continuous beam steering by coherent light-by-light control of dielectric metasurface phase gradient. Opt. Express, 28, 30107-30116(2020).

[8] H. Lu, B. Zheng, T. Cai, C. Qian, Y. Yang, Z. Wang, H. Chen. Frequency-controlled focusing using achromatic metasurface. Adv. Opt. Mater., 9, 2001311(2021).

[9] J. X. Wang, Y. Z. Cheng, H. Luo, F. Chen, L. Wu. High-gain bidirectional radiative circularly polarized antenna based on focusing metasurface. AEU-Int. J. Electron. Commun., 151, 154222(2022).

[10] S. Yin, F. He, W. Kubo, Q. Wang, J. Frame, N. G. Green, X. Fang. Coherently tunable metalens tweezers for optofluidic particle routing. Opt. Express, 28, 38949-38959(2020).

[11] Y. Chen, R. Zhao, H. He, X. Li, H. Zhou, N. Ullah, G. Geng, J. Li, Y. Wang, L. Huang. Spectrum dispersion element based on the metasurface with parabolic phase. Opt. Express, 30, 32670-32679(2022).

[12] M. I. Shalaev, J. B. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, N. M. Litchinitser. High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode. Nano Lett., 15, 6261-6266(2015).

[13] X. Guo, Y. Ding, X. Chen, Y. Duan, X. Ni. Molding free-space light with guided wave-driven metasurfaces. Sci. Adv., 6, eabb4142(2020).

[14] Y. Q. Hu, L. Li, Y. J. Wang, M. Meng, L. Jin, X. H. Luo, Y. Q. Chen, X. Li, S. M. Xiao, H. B. Wang, Y. Luo, C. W. Qiu, H. G. Duan. Trichromatic and tripolarization-channel holography with noninterleaved dielectric metasurface. Nano Lett., 20, 994-1002(2020).

[15] Y. Y. Shi, C. W. Wan, C. J. Dai, Z. J. Wang, S. Wan, G. X. Zheng, S. Zhang, Z. Y. Li. Augmented reality enabled by on-chip meta-holography multiplexing. Laser Photon. Rev., 16, 2100638(2022).

[16] S. Sun, Q. He, J. Hao, S. Xiao, L. Zhou. Electromagnetic metasurfaces: physics and applications. Adv. Opt. Photon., 11, 380(2019).

[17] M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, Y. S. Kivshar. High-efficiency dielectric Huygens’ surfaces. Adv. Opt. Mater., 3, 813-820(2015).

[18] Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, A. I. Kuznetsov. High-transmission dielectric metasurface with 2 phase control at visible wavelengths. Laser Photon. Rev., 9, 412-418(2015).

[19] J. Li, T. S. Wu, W. B. Xu, Y. M. Liu, C. Liu, Y. Wang, Z. Y. Yu, D. F. Zhu, L. Yu, H. Ye. Mechanisms of 2π phase control in dielectric metasurface and transmission enhancement effect. Opt. Express, 27, 23186-23196(2019).

[20] P. Lalanne, P. Chavel. Metalenses at visible wavelengths: past, present, perspectives. Laser Photon. Rev., 11, 1600295(2017).

[21] X. J. Ni, A. V. Kildishev, V. M. Shalaev. Metasurface holograms for visible light. Nat. Commun., 4, 2807(2013).

[22] G. Y. Lee, G. Yoon, S. Y. Lee, H. Yun, J. Cho, K. Lee, H. Kim, J. Rho, B. Lee. Complete amplitude and phase control of light using broadband holographic metasurfaces. Nanoscale, 10, 4237-4245(2018).

[23] A. C. Overvig, S. Shrestha, S. C. Malek, M. Lu, A. Stein, C. Zheng, N. Yu. Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light Sci. Appl., 8, 92(2019).

[24] H. Ren, X. Fang, J. Jang, J. Bürger, J. Rho, S. A. Maier. Complex-amplitude metasurface-based orbital angular momentum holography in momentum space. Nat. Nanotechnol., 15, 948-955(2020).

[25] J. Zhang, X. Z. Wei, I. D. Rukhlenko, H. T. Chen, W. R. Zhu. Electrically tunable metasurface with independent frequency and amplitude modulations. ACS Photon., 7, 265-271(2020).

[26] C. L. Zheng, J. Li, Z. Yue, J. T. Li, J. Y. Liu, G. C. Wang, S. L. Wang, Y. T. Zhang, Y. Zhang, J. Q. Yao. All-dielectric trifunctional metasurface capable of independent amplitude and phase modulation. Laser Photon. Rev., 16, 2200051(2022).

[27] H. T. Chen, A. J. Taylor, N. Yu. A review of metasurfaces: physics and applications. Rep. Prog. Phys., 79, 076401(2016).

[28] Y. Meng, Y. Chen, L. Lu, Y. Ding, A. Cusano, J. A. Fan, Q. Hu, K. Wang, Z. Xie, Z. Liu, Y. Yang, Q. Liu, M. Gong, Q. Xiao, S. Sun, M. Zhang, X. Yuan, X. Ni. Optical meta-waveguides for integrated photonics and beyond. Light Sci. Appl., 10, 235(2021).

[29] Y. Y. Shi, C. W. Wan, C. J. Dai, S. Wan, Y. Liu, C. Zhang, Z. Y. Li. On-chip meta-optics for semi-transparent screen display in sync with AR projection. Optica, 9, 670-676(2022).

[30] A. Yulaev, W. Zhu, C. Zhang, D. A. Westly, H. J. Lezec, A. Agrawal, V. Aksyuk. Metasurface-integrated photonic platform for versatile free-space beam projection with polarization control. ACS Photon., 6, 2902-2909(2019).

[31] Z. Xie, T. Lei, F. Li, H. Qiu, Z. Zhang, H. Wang, C. Min, L. Du, Z. Li, X. Yuan. Ultra-broadband on-chip twisted light emitter for optical communications. Light Sci. Appl., 7, 18001(2018).

[32] G. B. Wu, S. Y. Zhu, S. W. Pang, C. H. Chan. Superheterodyne-inspired waveguide-integrated metasurfaces for flexible free-space light manipulation. Nanophotonics, 11, 4499-4514(2022).

[33] C. K. Xie, L. R. Huang, W. B. Liu, W. Hong, J. F. Ding, W. Wu, M. Guo. Bifocal focusing and polarization demultiplexing by a guided wave-driven metasurface. Opt. Express, 29, 25709-25719(2021).

[34] B. Fang, Z. Z. Wang, S. L. Gao, S. N. Zhu, T. Li. Manipulating guided wave radiation with integrated geometric metasurface. Nanophotonics, 11, 1923-1930(2022).

[35] K. L. Xi, B. Fang, L. Ding, L. Li, S. L. Zhuang, Q. Q. Cheng. Terahertz Airy beam generated by Pancharatnam-Berry phases in guided wave-driven metasurfaces. Opt. Express, 30, 16699-16711(2022).

[36] R. Yang, S. Wan, Y. Y. Shi, Z. J. Wang, J. Tang, Z. Y. Li. Immersive tuning the guided waves for multifunctional on-chip metaoptics. Laser Photon. Rev., 16, 2200127(2022).

[37] S. Chen, J. Huang, S. Yin, M. M. Milosevic, H. Pi, J. Yan, H. M. H. Chong, X. Fang. Metasurfaces integrated with a single-mode waveguide array for off-chip wavefront shaping. Opt. Express, 31, 15876-15887(2023).

[38] J. M. Liu, X. Fang, F. He, S. Q. Yin, W. Lyu, H. Geng, X. J. Deng, X. P. Zheng. Directional conversion of a THz propagating wave into surface waves in deformable metagratings. Opt. Express, 29, 21749-21762(2021).

[39] W. Lyu, J. M. Liu, S. Q. Yin, X. J. Deng, X. Fang, H. Geng, X. P. Zheng. Deep-subwavelength gap modes in all-dielectric metasurfaces for high-efficiency and large-angle wavefront bending. Opt. Express, 30, 12080-12091(2022).

[40] J. M. Dai, J. Q. Zhang, W. L. Zhang, D. Grischkowsky. Terahertz time-domain spectroscopy characterization of the far-infrared absorption and index of refraction of high-resistivity, float-zone silicon. J. Opt. Soc. Am. B, 21, 1379-1386(2004).

[41] M. Naftaly, R. E. Miles. Terahertz time-domain spectroscopy for material characterization. Proc. IEEE, 95, 1658-1665(2007).

[42] P. A. Anderson, B. S. Schmidt, M. Lipson. High confinement in silicon slot waveguides with sharp bends. Opt. Express, 14, 9197-9202(2006).

[43] W. K. Pan, Z. Wang, Y. Z. Chen, S. Q. Li, X. Y. Zheng, X. Z. Tian, C. Chen, N. X. Xu, Q. He, L. Zhou, S. L. Sun. High-efficiency generation of far-field spin-polarized wavefronts via designer surface wave metasurfaces. Nanophotonics, 11, 2025-2036(2022).

[44] J. W. Goodman. Introduction to Fourier Optics(2005).

[45] X. Cai, J. Wang, M. J. Strain, B. Johnson-Morris, J. Zhu, M. Sorel, J. L. O’Brien, M. G. Thompson, S. Yu. Integrated compact optical vortex beam emitters. Science, 338, 363-366(2012).

[46] J. Zhu, X. Cai, Y. Chen, S. Yu. Theoretical model for angular grating-based integrated optical vortex beam emitters. Opt. Lett., 38, 1343-1345(2013).

[47] S. Li, Y. Ding, X. Guan, H. Tan, Z. Nong, L. Wang, L. Liu, L. Zhou, C. Yang, K. Yvind, L. K. Oxenlowe, S. Yu, X. Cai. Compact high-efficiency vortex beam emitter based on a silicon photonics micro-ring. Opt. Lett., 43, 1319-1322(2018).

[48] M. Ritsch-Marte. Orbital angular momentum light in microscopy. Philos. Trans. R. Soc. A, 375, 20150437(2017).

[49] T. Omatsu, K. Miyamoto, K. Toyoda, R. Morita, Y. Arita, K. Dholakia. A new twist for materials science: the formation of chiral structures using the angular momentum of light. Adv. Opt. Mater., 7, 1801672(2019).

[50] A. Kritzinger, A. Forbes, P. B. C. Forbes. Optical trapping and fluorescence control with vectorial structured light. Sci. Rep., 12, 17690(2022).

[51] Z. Wan, Y. Shen, Z. Wang, Z. Shi, Q. Liu, X. Fu. Divergence-degenerate spatial multiplexing towards future ultrahigh capacity, low error-rate optical communications. Light Sci. Appl., 11, 144(2022).

[52] S. Liu, Y. Lou, J. Jing. Orbital angular momentum multiplexed deterministic all-optical quantum teleportation. Nat. Commun., 11, 3875(2020).

[53] G. Milione, H. I. Sztul, D. A. Nolan, R. R. Alfano. Higher-order Poincare sphere, Stokes parameters, and the angular momentum of light. Phys. Rev. Lett., 107, 053601(2011).

[54] S. A. Schulz, T. Machula, E. Karimi, R. W. Boyd. Integrated multi vector vortex beam generator. Opt. Express, 21, 16130-16141(2013).

[55] X. Wang, Z. Nie, Y. Liang, J. Wang, T. Li, B. Jia. Recent advances on optical vortex generation. Nanophotonics, 7, 1533-1556(2018).

[56] Y. Jiang, Y. Cao, X. Feng. Progress in integrated devices for optical vortex emission. J. Phys. D, 53, 303002(2020).

[57] H. L. Pi, W. K. Yu, J. Z. Yan, X. Fang. Coherent generation of arbitrary first-order Poincare sphere beams on an Si chip. Opt. Express, 30, 7342-7355(2022).

[58] H. Zhang, J. Zeng, X. Lu, Z. Wang, C. Zhao, Y. Cai. Review on fractional vortex beam. Nanophotonics, 11, 241-273(2022).

[59] M. D. Henry, S. Walavalkar, A. Homyk, A. Scherer. Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars. Nanotechnology, 20, 255305(2009).

[60] J. Parasuraman, A. Summanwar, F. Marty, P. Basset, D. E. Angelescu, T. Bourouina. Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio. Microelectron. Eng., 113, 35-39(2014).

[61] W. Y. Liu, Q. L. Yang, Q. Xu, X. H. Jiang, T. Wu, K. M. Wang, J. Q. Gu, J. G. Han, W. L. Zhang. Multifunctional all-dielectric metasurfaces for terahertz multiplexing. Adv. Opt. Mater., 9, 2100506(2021).

[62] X. Y. Liu, W. Chen, Y. J. Ma, Y. N. Xie, J. Zhou, L. G. Zhu, Y. D. Xu, J. F. Zhu. Enhancing THz fingerprint detection on the planar surface of an inverted dielectric metagrating. Photon. Res., 10, 2836-2845(2022).

[63] W. K. Tang, M. Z. Chen, J. Y. Dai, Y. Zeng, X. S. Zhao, S. Jin, Q. Cheng, T. J. Cui. Wireless communications with programmable metasurface: new paradigms, opportunities, and challenges on transceiver design. IEEE Wirel. Commun., 27, 180-187(2020).

[64] S. So, J. Mun, J. Park, J. Rho. Revisiting the design strategies for metasurfaces: fundamental physics, optimization, and beyond. Adv. Mater., 35, 2206399(2023).