[1] HARVEY J E, KRYWONOS A, VERNOLD C L. Modified Beckmann-Kirchhoff scattering model for rough surfaces with large incident and scattering angles [J]. Opt Eng(S0091-3286), 2007, 46(7): 1-10.
[2] XU Chang-shan, GONG Yan, XIANG Yang, et al. Effects of transfer function of profile meter on roughness measurement of ultra-smooth surface [J]. Optics and Precision Engineering, 2002, 10(1): 45-49.
[3] WANG Ming-jun, DONG Yan-bin, WU Zhen-shen, et al. Research on light scattering characteristics of rough surface and optical constants deduction [J]. Infrared and Laser Engineering, 2002, 10(1): 45-49.
[4] XU Ling-di, ZHANG Xue-jun, WANG Xu. Surface Coating Technique of Reaction Bonded SiC Mirrors [J]. Opto-Electronic Engineering, 2009, 36(1): 120-124.
[5] Lo S P, Chiu J T, Lin H Y, Rapid measurement of surface roughness for face-milling aluminum using laser scattering and Taguchimethod [J]. Int J Adv Manuf Technol (S0268-3768), 2005, 26: 1071-1077.
[6] HAN Jin-hong, ZHANG Xian-feng. Study on signal collection Processing of surface roughness by Matlab [J].Chinese Journal of Scientific Instrument, 2006, 27(6): 1328-1329.
[7] WANG Ying-long, ZHANG Rong-mei, FU Guang-sheng, et al. Influence of inert gas pressure on the surface roughness of silicon film prepared by pulsed laser deposition [J]. Chinese J.Lasers, 2004, 31(6): 698-700.
[8] YU Yong-hui, TU Qiao-ling, XU Xia, et al. Design of High-Speed Data Acquisition System Based on USB2.0 and Linear CCD [J]. Piezoelectrics & Acoustooptics, 2009, 31(3): 448-450.
[9] LIU Wei-ming, HE Yong-yi, LI Jing, et al. H igh-speed Surface RoughnessM easuring System Based on USB2. 0[J]. Instrument Technique and Sensor, 2008, (2): 53-55.
[10] DU Yan-li, YANG Jing, YAN Hui-min. New Data Processing Method of Two-path Differential White Light Interference Spectrum [J]. Opto-Electronic Engineering, 2009, 36(5): 140-144.