Control System for Wafer Transport Device Based on High-precision Prealigner

SONG Yi-xu; YANG Ze-hong; LI Shi-chang; ZHAO Yan-nan

Journals >Opto-Electronic Engineering >Volume 35 >Issue 10 >Page 116 > Article

Opto-Electronic Engineering
Vol. 35, Issue 10, 116 (2008)

Control System for Wafer Transport Device Based on High-precision Prealigner

SONG Yi-xu^*, YANG Ze-hong, LI Shi-chang, and ZHAO Yan-nan

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[in Chinese]

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DOI: Cite this Article

SONG Yi-xu, YANG Ze-hong, LI Shi-chang, ZHAO Yan-nan. Control System for Wafer Transport Device Based on High-precision Prealigner[J]. Opto-Electronic Engineering, 2008, 35(10): 116 Copy Citation Text

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References

[3] Baker Gregory G,Boylev Edwark F Wafer Centration Device:U.S.Patent,4880384[P].1989-11-14

[4] Yamamoto Satoshi,Kamei Kenji.Apparatus for Detecting Position of a Notch in a Semiconductor Wafer:U.S.Patent,5438209[P].1995-8-1

[5] Nakazato Hiroshi,Matsumura Takashi,Akamatsu Takahiro,et al.Device for Positioning a Semi-Conductor Wafer:U.S.Patent 4887904[P].1989-12-19

[6] Koenig Franklin R.Edge Finding in Wafers:U.S.Patent,4752898[P].1988-6-21

SONG Yi-xu, YANG Ze-hong, LI Shi-chang, ZHAO Yan-nan. Control System for Wafer Transport Device Based on High-precision Prealigner[J]. Opto-Electronic Engineering, 2008, 35(10): 116

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