Jisen YANG, Fu XIU, Jing ZHANG, Junsong YUAN, Xiaolong ZHANG. Absolute planar two-dimensional time-grating displacement sensor with multi-frequency magnetic field coupling[J]. Optics and Precision Engineering, 2024, 32(20): 3026
- Optics and Precision Engineering
- Vol. 32, Issue 20, 3026 (2024)
Fig. 1. Mathematical model of magnetic field distribution of single pitch rectangular coil
Fig. 2. Numerical simulation of magnetic field distribution of a single pitch rectangular coil
Fig. 3. Magnetic field distribution of different coil widths
Fig. 4. Schematic diagram of incremental two-dimensional time-gating sensor
Fig. 5. Schematic diagram of winding and arrangement of incremental two-dimensional time-grating coils
Fig. 6. Numerical simulation diagram of magnetic field distribution of double pitch double excitation coil
Fig. 7. Incremental two-dimensional time-graing signal processing block diagram
Fig. 8. Absolute two-dimensional time-grating displacement sensor measurement model
Fig. 9. Schematic diagram of winding and arrangement of absolute two-dimensional time-grating coils
Fig. 10. Two-dimensional time-sharing incentive drive scheme flow chart
Fig. 11. Two-dimensional absolute position solution block diagram
Fig. 12. Flow chart of solving the absolute position of the two dimensional time-grating for the polar prime
Fig. 13. Induced traveling wave signal and counting diagram
Fig. 14. Induction travelling wave signal graph
Fig. 15. Simulation error curves for different installation gaps
Fig. 16. Simulation error spectra of different installation gaps
Fig. 17. Absolute position solution simulation traveling wave signal diagram
Fig. 18. Simulation validation of two-dimension absolute position solving scheme
Fig. 19. Sensor prototyping
Fig. 20. Two-dimensional precision experimental platform
Fig. 21. Sensor raw amplified sensing signal
Fig. 22. Experimental accuracy in polar
Fig. 23. Two different installation states
Fig. 24. Sensor stability testing
Fig. 25. Raw error curve in the effective measuring range
Fig. 26. [in Chinese]
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Table 1. Precision counter polar meter
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Table 2. Sensor simulation parameter setting
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Table 3. Analysis and summary of simulation error of precision measurement channel under different installation gap
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Table 3. Analysis and summary of simulation error of precision measurement channel under different installation gap
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