• Optics and Precision Engineering
  • Vol. 32, Issue 20, 3026 (2024)
Jisen YANG1,2,3,*, Fu XIU1,3, Jing ZHANG4, Junsong YUAN1,3, and Xiaolong ZHANG1,3
Author Affiliations
  • 1Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing400054, China
  • 2Key Laboratory of Advanced Manufacturing Technology for Automobile Parts, Ministry of Education, Chongqing400054, China
  • 3Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing400054, China
  • 4School of Electrical and Electronic Engineering, Chongqing University of Technology, Chongqing0005, China
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    DOI: 10.37188/OPE.20243220.3026 Cite this Article
    Jisen YANG, Fu XIU, Jing ZHANG, Junsong YUAN, Xiaolong ZHANG. Absolute planar two-dimensional time-grating displacement sensor with multi-frequency magnetic field coupling[J]. Optics and Precision Engineering, 2024, 32(20): 3026 Copy Citation Text show less

    Abstract

    Aiming at the problem that incremental planar two-dimensional (2-D) time-grating displacement sensors need to be zeroed when they are powered up, an absolute planar 2-D time-grating displacement sensor based on multi-frequency magnetic field coupling was designed, which adopts time-driven excitation signals of different frequencies to reduce the power consumption of the sensor circuit and at the same time make the decoupling of signals in the X and Y directions and the 2-D absolute position solving simpler and more reliable. Firstly, a mathematical model of magnetic field distribution of the excitation coil was established, and the relationship between the width of the excitation coil and the height of the coupled air gap was analyzed according to the characteristics of the spatial magnetic field distribution; based on the incremental 2-D time-grating displacement sensor structure of the differential structure, an absolute planar 2-D time-grating measurement model of the opposite poles reciprocal structure was established, and a new scheme for the 2-D absolute position solution based on the look-up table method was proposed, which avoided the influence of the measurement error on the solution result in the practical application; the feasibility of this solution was verified by electromagnetic field simulation, and the optimal installation gap of the sensor was determined to be 0.8 mm; finally, the sensor prototype was fabricated, and the 2-D precision experimental platform was constructed for performance testing. The experimental results show that the sensor prototype in the effective measuring range of 147 mm ×147 mm, the original measurement errors in the X and Y directions are ±20.4 μm and ±21.1 μm, respectively, and it has the advantages of no need to find the zero point on power-on, which realizes the all-in-one 2-D absolute displacement measurement and positioning.
    dB=μ04πIdl×FEFE3=μ04πIdlsinθFE2(1)

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    l=HtanθFE=Hsinθcosθ1=(b+y)(x+a)2+z2+(b+y)2cosθ2=(b-y)(x+a)2+z2+(b-y)2H=(x+a)2+z2(2)

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    BA1B1=dB=μ0I4πFE2A1B1sinθdl=μ0I4πHθ1π-θ2sinθdθ=μ0I4πH(cosθ1+cosθ2),(3)

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    BA1B1Z=BA1B1cosα=μ0I(a+x)4π(a+x)2+z2×(b+y)(a+x)2+z2+(b+y)2+(b-y)(a+x)2+z2+(b-y)2(4)

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    BC1D1Z=BC1D1cosβ=μ0I(a-x)4π(a-x)2+z2×(b-y)(a-x)2+z2+(b-y)2+(b+y)(a-x)2+z2+(b+y)2(5)

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    Bz=i=14BAiBiZ+i=14BCiDiZ(6)

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    Isx=Asin(ω1t)Icx=Acos(ω1t)Isy=Asin(ω2t)Icy=Acos(ω2t)(7)

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    Φsx+(t,x)=2Bsx+xx+W4-d2(W-d)2sin2πxWdxΦcx+(t,x)=2Bcx+x+W4+d2x+W2(W-d)2sin2πxWdxΦsx-(t,x)=2Bsx-x+W2+dx+3W4+d2(W-d)2sin2πxWdxΦcx-(t,x)=2Bcx-x+3W4+3d2x+W+d(W-d)2sin2πxWdx(8)

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    Φsy+(t,y)=2Bsy+yy+W4-d2(W-d)2sin2πyWdyΦcy+(t,y)=2Bcy+y+W4+d2y+W2(W-d)2sin2πyWdyΦsy-(t,y)=2Bsy-y+W2+dy+3W4+d2(W-d)2sin2πyWdyΦcy-(t,y)=2Bcy-y+3W4+3d2y+W+d(W-d)2sin2πyWdy(9)

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    ex=Cxcosω1t-2πxW-Cxcosω1t-2πxW+π=2Cxcosω1t-2πxW,(10)

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    ey=Cycosω2t-2πyW-Cycosω2t-2πyW+π=2Cycosω2t-2πyW,(11)

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    ΔX=VΔtx=WNx+ΔtxTx=WNx+ω1Δtx2πΔY=VΔty=WNy+ΔtyTy=WNy+ω2Δty2π(12)

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    U1=4Dxcosω1t-2πx1W1+φ1=K1cosω1t-M2πx1L+φ1U2=4Dycosω2t-2πy1W1+φ2=K2cosω2t-M2πy1L+φ2U3=4Excosω3t-2πx2W2+φ3=K3cosω3t-N2πx2L+φ3U4=4Eycosω4t-2πy2W2+φ4=K4cosω4t-N2πy2L+φ4(13)

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    P1=2πΔT1T=M×2πx1LP2=2πΔT2T=M×2πy1LP3=2πΔT3T=N×2πx2LP4=2πΔT4T=N×2πy2L(14)

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    X=Qx×W2+x2=Qx+P32π×LNY=Qy×W2+y2=Qy+P42π×LN(15)

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    Eor=L2M×N=1680002×16×21=250 μm(16)

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    Er1=A1+A22+A2-A12cos4πxWsinωt+arctanA1sin2πxW-A2cos2πxW(17)

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    Em=Asinωt+arctansin2πxW-cos2πxW(18)

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    ε(x)=W2πarctanA1sin2πxW-A2cos2πxW-arctansin2πxW-cos2πxW=W2πA1-A2A2sin22πxW(19)

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    Er2=A2cos22πxW+A2sin22πxW+φsinωt+arctanA1sin2πxW+φ-A2cos2πxW(20)

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    ε'(x)=W2πarctansin2πxW+φ-cos2πxW-arctansin2πxW-cos2πxW=-12sin2φ2W2πsin22πxW(21)

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    Jisen YANG, Fu XIU, Jing ZHANG, Junsong YUAN, Xiaolong ZHANG. Absolute planar two-dimensional time-grating displacement sensor with multi-frequency magnetic field coupling[J]. Optics and Precision Engineering, 2024, 32(20): 3026
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