Optical Design of F-Theta Scanning Lens for Laser Resistor Trimming Machine

SHI Haodong; HE Jingyi; GUO Litao; ZHOU Zinan

doi:10.3969/j.issn.1003-501x.2013.11.009

Journals >Opto-Electronic Engineering >Volume 40 >Issue 11 >Page 51 > Article

Opto-Electronic Engineering
Vol. 40, Issue 11, 51 (2013)

Optical Design of F-Theta Scanning Lens for Laser Resistor Trimming Machine

SHI Haodong^1、2、*, HE Jingyi^1、2, GUO Litao¹, and ZHOU Zinan¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1003-501x.2013.11.009 Cite this Article

SHI Haodong, HE Jingyi, GUO Litao, ZHOU Zinan. Optical Design of F-Theta Scanning Lens for Laser Resistor Trimming Machine[J]. Opto-Electronic Engineering, 2013, 40(11): 51 Copy Citation Text

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References

[1] SONG Yunduo. Optical Design of Laser Resistor Trimming Machine [J]. Microcomputer Information, 2005, 21(10)：44-45.

[2] SIMONT. F-Sin(theta) lens system and application [J]. Procceeding of SPIE(S0277-786X), 2001, 4441：98-105.

[3] JI Yiqun. Optical Design of Large Working Area F-Theta Lens [J]. Acta Optica Sinica, 2005, 25(11)：1541-1544.

[4] ZHANG Yimo. Applied Optics [M]. Tianjin：Mechanical Industry Press, 1982：85-93.

[5] QIN Shuijie. Design of two-piece f·θ lens [J]. Applied Optics, 1994, 15(2)：17-20.

[6] Kogelnick H. Laser Beam Propagation [M]. New York, Academic：Appliced Optics and Optical Engineering, 1979.

[7] Welford W T. Aberration of Optical System [M]. England：Adam Hilger Ltd, 1986.

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SHI Haodong, HE Jingyi, GUO Litao, ZHOU Zinan. Optical Design of F-Theta Scanning Lens for Laser Resistor Trimming Machine[J]. Opto-Electronic Engineering, 2013, 40(11): 51

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