• Acta Photonica Sinica
  • Vol. 53, Issue 5, 0553110 (2024)
Wenhao LI, Pinggang JIA, Jun WANG, Bo XUE..., Shun WAN, Kaiyao HOU and Jijun XIONG*|Show fewer author(s)
Author Affiliations
  • State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China
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    DOI: 10.3788/gzxb20245305.0553110 Cite this Article
    Wenhao LI, Pinggang JIA, Jun WANG, Bo XUE, Shun WAN, Kaiyao HOU, Jijun XIONG. High Sensitivity Micro Fiber Fabry Perot Pressure Sensor Based on Silicon MEMS Technology[J]. Acta Photonica Sinica, 2024, 53(5): 0553110 Copy Citation Text show less
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    Wenhao LI, Pinggang JIA, Jun WANG, Bo XUE, Shun WAN, Kaiyao HOU, Jijun XIONG. High Sensitivity Micro Fiber Fabry Perot Pressure Sensor Based on Silicon MEMS Technology[J]. Acta Photonica Sinica, 2024, 53(5): 0553110
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