Wenhao LI, Pinggang JIA, Jun WANG, Bo XUE, Shun WAN, Kaiyao HOU, Jijun XIONG. High Sensitivity Micro Fiber Fabry Perot Pressure Sensor Based on Silicon MEMS Technology[J]. Acta Photonica Sinica, 2024, 53(5): 0553110
- Acta Photonica Sinica
- Vol. 53, Issue 5, 0553110 (2024)
Fig. 1. Schematic of sensor structure
Fig. 2. Numerical simulation of the relationship between sensitive membrane thickness and sensor pressure range and sensitivity
Fig. 3. Process flow diagram of pressure sensor production
Fig. 4. Sensor head and fiber optic integration
Fig. 5. Fiber optic Fabry Perot demodulation system based on Fiso
Fig. 6. Schematic diagram of sensor air pressure performance testing
Fig. 7. Sensor pressure test results
Fig. 8. Results of pressure sensing experiments at different temperatures
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Table 1. SOI specific parameters
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Table 2. Structural parameters of the pressure sensor
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