• Acta Optica Sinica
  • Vol. 32, Issue 6, 631001 (2012)
Wu Suyong*, Long Xingwu, and Yang Kaiyong
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201232.0631001 Cite this Article Set citation alerts
    Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to Minimize the Characterization Deviations of Optical Parameters of Thin Films Caused by Ellipsometric Measurement Systematic Errors[J]. Acta Optica Sinica, 2012, 32(6): 631001 Copy Citation Text show less
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    Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to Minimize the Characterization Deviations of Optical Parameters of Thin Films Caused by Ellipsometric Measurement Systematic Errors[J]. Acta Optica Sinica, 2012, 32(6): 631001
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