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    Journals >Acta Optica Sinica >Volume 31 >Issue 11 >Page 1131001 > Article
    • Acta Optica Sinica
    • Vol. 31, Issue 11, 1131001 (2011)
    Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer
    Zhu Yadan*, Fang Ming, and Yi Kui
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    DOI: 10.3788/aos201131.1131001 Cite this Article Set citation alerts
    Zhu Yadan, Fang Ming, Yi Kui. Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer[J]. Acta Optica Sinica, 2011, 31(11): 1131001 Copy Citation Text show less
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    Zhu Yadan, Fang Ming, Yi Kui. Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer[J]. Acta Optica Sinica, 2011, 31(11): 1131001
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