[2] WANG Wei-bing,CHEN Da-peng,YE Tian-chun,et al.An uncooled infrared imaging system based on novel stencil bi-material cantilever structure[A].Proc.Asia-Pacific Conference of Transducers and Micro-Nano Technology[C].Sapporo,Japan:2004,3(2):794-798.
[3] ZHAO Yang.Optomechanical uncooled infrared imaging system[D].Berkeley,USA:Dissertation of UC,Berkeley,2002.
[4] ZHAO Y,MAO M,HOROWITZ R,et al.Optomechanical uncooled infrared imaging system:design,microfabrication,and performance[J].J.of MEMS,2002,11(2):136-146.
[5] Biao LI.Design and simulation of an uncooled double-cantilever microbolometer with the potential for~mK NETD[J].Sensors and Actuators A,2004,112:351-359.