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    Journals >Acta Optica Sinica >Volume 33 >Issue 2 >Page 231002 > Article
    • Acta Optica Sinica
    • Vol. 33, Issue 2, 231002 (2013)
    Shadowing Masks for Thickness Uniformity in a Plane Planetary System
    Guo Chun1、2、*, Kong Mingdong1, Liu Cunding1, and Li Bincheng1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201333.0231002 Cite this Article Set citation alerts
    Guo Chun, Kong Mingdong, Liu Cunding, Li Bincheng. Shadowing Masks for Thickness Uniformity in a Plane Planetary System[J]. Acta Optica Sinica, 2013, 33(2): 231002 Copy Citation Text show less
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    Article index updated: May. 19, 2024
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    Guo Chun, Kong Mingdong, Liu Cunding, Li Bincheng. Shadowing Masks for Thickness Uniformity in a Plane Planetary System[J]. Acta Optica Sinica, 2013, 33(2): 231002
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