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    Journals >Acta Optica Sinica >Volume 29 >Issue 7 >Page 1877 > Article
    • Acta Optica Sinica
    • Vol. 29, Issue 7, 1877 (2009)
    Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry
    Xue Hui*, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, and Zhang Yueguang
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    Xue Hui, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, Zhang Yueguang. Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry[J]. Acta Optica Sinica, 2009, 29(7): 1877 Copy Citation Text show less
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    Xue Hui, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, Zhang Yueguang. Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry[J]. Acta Optica Sinica, 2009, 29(7): 1877
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