Design of Wavelength-Variable Standard Spherical Lens in Fizeau Interferometer

Yan Wang; Qiyuan Zhang; Quanzhao Wang; Qiubai Chen; Fang Wang; Shuai Xu; Sen Han

doi:10.3788/LOP202158.0811004

Journals >Laser & Optoelectronics Progress >Volume 58 >Issue 8 >Page 0811004 > Article

Laser & Optoelectronics Progress
Vol. 58, Issue 8, 0811004 (2021)

Design of Wavelength-Variable Standard Spherical Lens in Fizeau Interferometer

Yan Wang¹, Qiyuan Zhang², Quanzhao Wang³, Qiubai Chen¹, Fang Wang¹, Shuai Xu^2、4, and Sen Han^1、2、*

Author Affiliations

¹School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

²Suzhou H&L Instruments LLC., Suzhou, Jiangsu 215123, China;

³Suzhou W&N Instruments LLC., Suzhou, Jiangsu 215123, China;

⁴School of Mathematics and Physics, Suzhou University of Science and Technology, Suzhou, Jiangsu 215009, China

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DOI: 10.3788/LOP202158.0811004 Cite this Article Set citation alerts

Yan Wang, Qiyuan Zhang, Quanzhao Wang, Qiubai Chen, Fang Wang, Shuai Xu, Sen Han. Design of Wavelength-Variable Standard Spherical Lens in Fizeau Interferometer[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0811004 Copy Citation Text

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Fig. 1. Working principle of standard spherical lens

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Fig. 2. Principle of wavelength-variable standard spherical lens. (a) l_F=R_ref; (b) l'_F≠R_ref; (c) l″_F=R_ref

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Fig. 3. Structural diagrams of multi-wavelength standardspherical lens. (a) F₁=5.6; (b) F₁=8

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Fig. 4. Wavefront maps of standard spherical lens at 532 nm. (a) F₁=5.6; (b) F₁=8

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Fig. 5. Wavefront maps of standard spherical lens with F₁=8 at other 5 wavelengths. (a) 561 nm; (b) 632.8 nm; (c) 671 nm; (d) 721 nm; (e) 1064 nm

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Fig. 6. Mechanical design scheme of multi-wavelength standard spherical lens. (a) Structural diagram; (b) sectional view

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Fig. 7. Machining error analysis of lens. (a) Scale ruler; (b) thread diagram

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Fig. 8. Physical object of wavelength-variable standard spherical lens

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Fig. 9. Principle diagram of standard spherical lens transmitted wavefront measurement

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Fig. 10. Result of standard spherical lens transmitted wavefront measurement

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Fig. 11. Principle diagram of wavelength-variable standard spherical lens detection

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Fig. 12. Surface profile measurement results under different wavelengths. (a) 532 nm; (b) 561 nm; (c) 632.8 nm; (d) 671 nm; (e) 721 nm; (f) 3D figure

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Fig. 13. Schematic of coincidence error

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Fig. 14. Sample profile measured by 1064 nm standard spherical lens at 632.8 nm

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Wavelength /nm	532	561	632.8	671	721	1064
Interval /mm	0.61	1.20	2.37	2.86	3.41	5.84

Table 1. Working wavelengths of standard spherical lens with F₁=5.6 and corresponding intervals

Wavelength /nm	532	561	632.8	671	721	1064
Interval /mm	1.30	2.39	4.52	5.42	6.43	10.86

Table 2. Working wavelengths of standard spherical lens with F₁=8 and corresponding intervals

Wavelength /nm	532	561	632.8	671	721	1064
Upper limit position /mm	0.579	1.173	2.339	2.831	3.381	5.809
Wavefront aberration /nm	58.89	58.74	59.17	58.91	58.62	59.48
Standard position /mm	0.610	1.200	2.370	2.860	3.410	5.840
Wavefront aberration /nm	31.33	27.04	30.44	28.38	28.41	28.94
Lower limit position /mm	0.632	1.226	2.393	2.885	3.435	5.865
Wavefront aberration /nm	59.64	59.24	59.36	59.25	59.05	59.16
Tolerance /μm	53	53	54	54	54	56

Table 3. Interval tolerance analysis at each working wavelength of standard spherical lens with F₁=5.6

Wavelength /nm	532	561	632.8	671	721	1064
Upper limit position /mm	1.226	2.314	4.444	5.342	6.345	10.780
Wavefront aberration /nm	59.32	59.91	59.99	59.72	59.99	59.48
Standard position /mm	1.300	2.390	4.520	5.420	6.430	10.860
Wavefront aberration /nm	16.92	16.44	16.39	15.50	15.72	14.47
Lower limit position /mm	1.383	2.473	4.605	5.503	6.507	10.945
Wavefront aberration /nm	59.74	59.91	59.99	59.72	59.55	59.58
Tolerance /μm	157	159	161	161	162	165

Table 4. Interval tolerance analysis at each working wavelength of standard spherical lens with F₁=8

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