Spectral Measurement Method for Characteristic Parameters of Argon Discharge Plasma

Ming Xiong

doi:10.3788/LOP202259.1730002

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 17 >Page 1730002 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 17, 1730002 (2022)

Spectral Measurement Method for Characteristic Parameters of Argon Discharge Plasma

Ming Xiong^*

Author Affiliations

Institute of Physical and Chemical Engineering in Nuclear Industry, Tianjin 300180, China

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DOI: 10.3788/LOP202259.1730002 Cite this Article Set citation alerts

Ming Xiong. Spectral Measurement Method for Characteristic Parameters of Argon Discharge Plasma[J]. Laser & Optoelectronics Progress, 2022, 59(17): 1730002 Copy Citation Text

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Fig. 1. Flow chart of measuring plasma parameters by emission spectra measurement

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Fig. 2. Schematic diagram of the experimental system. (a) Simulation device of the ion extraction; (b) spectra measurement system

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Fig. 3. Contour plot of spectral line intensity ratio varying with (T_e,n_e)

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Fig. 4. Spatial distribution of plasma density in jet region under typical working conditions

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Fig. 5. Spatial distribution of plasma electron temperature in jet region under typical working conditions

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Kinetic reaction	Process	Related factor
Electron collision	$e + A r (i) \overset{R_{i j}^{e}}{\to} e + A r (j)$	T_e， n_e
Atomic collision	$A r + A r (j) \overset{R_{i j}^{a t o m}}{\to} A r + A r (i)$	T_g
Spontaneous radiation	$A r (j) \overset{A_{i j}}{\to} h v + A r (i)$	-
Electron impact ionization	$e + A r (i) \overset{K_{i}}{\to} e + e + A r^{+}$	T_e， n_e
Penning ionization	$A r (i) + A r (j) \overset{K_{i j}}{\to} e + A r + A r^{+}$	T_g
3-body collision	$e + e + A r^{+} \overset{β}{\to} e + A r (i)$	T_e， n_e， T_g
Self absorption	$η_{i j}$	d， N_low
Quenching at the wall	$K_{w a l l}$	d， T_g

Table 1. Kinetic reaction processes of the particle population equilibrium model^[9-10]

No.	r₁=I_738.4/I_912.3	r₂= I_696.5/I_750.4	n_e /（10¹⁰ cm^-3）	T_e /eV
1	0.323	0.190	6.16	2.61
2	0.330	0.189	5.98	2.61
3	0.320	0.186	5.91	2.58
Average	‒	‒	6.02	2.60

Table 2. Experimental results of argon plasma parameters measured by emission spectra measurement

Ming Xiong. Spectral Measurement Method for Characteristic Parameters of Argon Discharge Plasma[J]. Laser & Optoelectronics Progress, 2022, 59(17): 1730002

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