Xinpeng Li, Deyang Yu, Jin Guo, Fei Chen, Qikun Pan. High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources[J]. Chinese Journal of Lasers, 2023, 50(2): 0204002
- Chinese Journal of Lasers
- Vol. 50, Issue 2, 0204002 (2023)
Fig. 1. Structural diagram of spot position detection system
Fig. 2. Detection principle of four quadrant detector
Fig. 3. Absolute errors of solution results of second-order error compensation algorithm and correction algorithm
Fig. 4. Absolute errors of solution results of improved algorithm and second-order error compensation algorithm
Fig. 5. Hardware principle block diagram of signal synchronous acquisition and processing of four quadrant detector
Fig. 6. Hardware physical diagramof multi-channel synchronous acquisition circuit of high repetition frequency narrow pulse signal
Fig. 7. Physical diagram of test platform
Fig. 8. Comparison of absolute error of spot position detection between second-order error compensation algorithm and second-order extended error compensation algorithm
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