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    Journals >Chinese Journal of Lasers >Volume 50 >Issue 2 >Page 0204002 > Article
    • Chinese Journal of Lasers
    • Vol. 50, Issue 2, 0204002 (2023)
    High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources
    Xinpeng Li1,2, Deyang Yu1,*, Jin Guo1, Fei Chen1, and Qikun Pan1
    Author Affiliations
  • 1State Key Laboratory of Laser Interaction with Matter,Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,Jilin, China
  • 2University of Chinese Academy of Sciences,Beijing 100049, China
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    DOI: 10.3788/CJL220686 Cite this Article Set citation alerts
    Xinpeng Li, Deyang Yu, Jin Guo, Fei Chen, Qikun Pan. High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources[J]. Chinese Journal of Lasers, 2023, 50(2): 0204002 Copy Citation Text show less
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    Article index updated: Jun. 14, 2025
    The article is cited by 1 article(s) CLP online library. (Some content might be in Chinese.)
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    Xinpeng Li, Deyang Yu, Jin Guo, Fei Chen, Qikun Pan. High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources[J]. Chinese Journal of Lasers, 2023, 50(2): 0204002
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    Paper Information
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