Xiuhua Fu, Hongyu Huang, Jing Zhang, Gong Zhang, Shiping Yin, Kewu Liu. Anti-Reflection Protective Film of Chalcogenide Glass Substrate and Its Environmental Adaptability[J]. Acta Optica Sinica, 2020, 40(21): 2131002
- Acta Optica Sinica
- Vol. 40, Issue 21, 2131002 (2020)
Fig. 1. Theoretical reflectivity after optimization. (a) Anti-reflection protective film; (b) anti-reflection film
Fig. 2. Sample with film falling off at 140 ℃
Fig. 3. Relationship between thermal stress of germanium material and temperature difference
Fig. 4. Enlarged view of DLC film prepared at 15 Pa
Fig. 5. Raman spectra of DLC film. (a) Comparison; Gaussian fitting diagrams under different pressures of (b) 5 Pa, (c) 10 Pa and (d) 15 Pa
Fig. 6. DLC films prepared at different pressures. (a) Micrograph of DLC film prepared at 10 Pa; (b) sample with DLC film falling off at 5 Pa
Fig. 7. Surface diagram tested by Zygo interferometer. (a) Uncoated chalcogenide glass substrate; (b) DLC film prepared at pressure of 15 Pa; (c) DLC film prepared at pressure of 5 Pa
Fig. 8. DLC film after severe abrasion test. (a) Enlarged view; (b) sample
Fig. 9. Comparison between designed and actual test results. (a) One side reflectivity of anti-reflection protective film; (b) double side transmittance of anti-reflection film and anti-reflection protective film
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Table 1. Ion source parameters of dielectric film
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Table 2. Raman spectral fitting data of DLC film under different pressures
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