• Opto-Electronic Engineering
  • Vol. 32, Issue 3, 54 (2005)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Opto-Electronic Engineering, 2005, 32(3): 54 Copy Citation Text show less
    References

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    [2] DU Jing-lei, CUI Zheng, ZHANG Yi-xiao, et al. Enhancement of photolithography resolution by fractional Fourier domain filtering[J]. Microelectronic Engineering,2003,67-68:31-38.

    [3] ZALEVSKY Zeev, MENDLOVIC David. Gerchberg-Saxton Algorithm Applied in the Fractional Fourier or the Fresnel Domain[J]. Optics Letters,1996,21(12):842-844.

    [4] ZHANG Yi-xiang, DU Jing-lei, YANG Jing, et al. Fractional Fourier domain filtering applied to improve image quality in photolithography[J]. Proceedings of SPIE,2002,4755:755-759.

    [5] ZHANG Guo-qing, GU Ben-yuan. Design of Diffractive Phase Elements that Produce focal annuli: A new method[J]. Applied Optics,34(35):8110-8115.