Yuqiang Chen, Xiaodong Zhang, Xianlei Liu. Evaluation of Optical Performance of Free-Form Surface Imaging System[J]. Acta Optica Sinica, 2020, 40(24): 2412002
- Acta Optica Sinica
- Vol. 40, Issue 24, 2412002 (2020)
Fig. 1. Evaluation system of basic index of optical performance
Fig. 2. Flow chart of M-GS algorithm
Fig. 3. Schematic diagram of measurement of M-GS algorithm
Fig. 4. Schematic diagram of the optical path of plano-convex lens
Fig. 5. Simulation results of ZEMAX. (a) WFE; (b) PSF; (c) MTF
Fig. 6. Comparison of computational results. (a) PSF; (b) enlarged view of PSF center; (c) tangential MTF; (d) sagittal MTF
Fig. 7. Image spots obtained at different defocus distances. (a) 1000 μm; (b) -500 μm; (c) 0 μm; (d) 500 μm; (e) 1000 μm
Fig. 8. WFE obtained by different methods. (a) ZEMAX; (b) M-GS algorithm
Fig. 9. Experiment configuration
Fig. 10. Actual image spots at different defocus distances. (a) -1000 μm; (b) -600 μm; (c) -200 μm; (d) 200.0 μm; (e) 600 μm; (f) 1000 μm
Fig. 11. WFE obtained by different methods. (a) Interferometer; (b) M-GS algorithm
Fig. 12. PSF measured by different methods. (a) Center profile in X direction; (b) center magnified view in X direction; (c) center profile in Y direction; (d) center magnified view in Y direction
Fig. 13. MTF obtained by different methods. (a) X direction; (b) Y direction
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Table 1. Simulation parameter of the plano-convex lens
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Table 2. WFE parameters obtained by different methods
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Table 3. Main parameters of experiment devices
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Table 4. WFE parameters obtained by different methods (actual spot)
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