Xin Liu, Zhongming Yang, Zhaojun Liu, Jihong Wang. Design of large aperture fast steering mirror surface figure test system[J]. Infrared and Laser Engineering, 2022, 51(5): 20210514
- Infrared and Laser Engineering
- Vol. 51, Issue 5, 20210514 (2022)
Fig. 1. System of surface figure test system
Fig. 2. Layout of optical system
Fig. 3. Layout of system
Fig. 4. Flow chart of integrated optical-mechanical-thermal analysis
Fig. 5. Finite element model of system
Fig. 6. Displacement nephogram of system
Fig. 7. Wavefront aberration at different temperatures
Fig. 8. MTF curve of system at different temperatures
Fig. 9. MTF curve of system at 20°
Fig. 10. Curve of system aberration RMS with temperature
Fig. 11. Flow chart of system installation
Fig. 12. Picture of surface figure test system of FSM
Fig. 13. Curve of RMS with time
Fig. 14. Wave aberration measured by wavefront sensor
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Table 1. Parameters of shrink-beam system
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Table 2. Parameters of wavefront sensors
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