A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation

LIU Tong; ZHANG Liu; ZHANG Guan-yu; CHEN Chen; ZHONG Zhi-cheng

doi:10.3964/j.issn.1000-0593(2019)02-0377-06

Journals >Spectroscopy and Spectral Analysis >Volume 39 >Issue 2 >Page 377 > Article

Spectroscopy and Spectral Analysis
Vol. 39, Issue 2, 377 (2019)

A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation

LIU Tong^1、2, ZHANG Liu¹, ZHANG Guan-yu¹, CHEN Chen¹, and ZHONG Zhi-cheng¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2019)02-0377-06 Cite this Article

LIU Tong, ZHANG Liu, ZHANG Guan-yu, CHEN Chen, ZHONG Zhi-cheng. A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation[J]. Spectroscopy and Spectral Analysis, 2019, 39(2): 377 Copy Citation Text

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References

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