CHEN YUMING, TANG JINFA, GU PEIFU. Measurement and analysis of properties of films doped with oxides[J]. Acta Optica Sinica, 1986, 6(1): 70
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In this paper some techniques for measuring stress, absorption, scattering and other properties of thin films are described. The properties of some oxides and films doped withoxides are measured by using these techniques. Auger electron spectroscopy and X-ray diffraction technique are employed to analyse chemical compositions and crystal structures of films. Some useful results have been obtained.