• Optics and Precision Engineering
  • Vol. 21, Issue 4, 919 (2013)
FATIKOW Sergej1,2, EICHHORN Volkmar1, and DIEDERICHS Claas2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/ope.20132104.0919 Cite this Article
    FATIKOW Sergej, EICHHORN Volkmar, DIEDERICHS Claas. Nanorobotics and automation[J]. Optics and Precision Engineering, 2013, 21(4): 919 Copy Citation Text show less

    Abstract

    Nanohandling robots have become an enabling technology for analysis and prototyping in the field of nanotechnology and nanomaterials. Nanorobotic pick-and-place operations facilitate the flexible integration of individual nanostructures into existing micro devices increasing their overall performance and sensitivity. The automation of this so-called robotic micro-nano-integration is required to establish the technology not only in research labs, but also in industrial areas. In this paper, basic technologies for the development, integration and automation of nanohandling robots are presented. In addition, special handling strategies for the assembly of different kinds of Atomic Force Microscope(AFM) supertips are discussed.