Prepareation of Large Area Al-ZnO Thin Film by DC MagnetronSputtering

JIAO Fei; LIAO Cheng; HAN Jun-feng; ZHOU Zhen

doi:10.3964/j.issn.1000-0593(2009)03-0698-04

Journals >Spectroscopy and Spectral Analysis >Volume 29 >Issue 3 >Page 698 > Article

Spectroscopy and Spectral Analysis
Vol. 29, Issue 3, 698 (2009)

Prepareation of Large Area Al-ZnO Thin Film by DC MagnetronSputtering

JIAO Fei^*, LIAO Cheng, HAN Jun-feng, and ZHOU Zhen

Author Affiliations

[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2009)03-0698-04 Cite this Article

JIAO Fei, LIAO Cheng, HAN Jun-feng, ZHOU Zhen. Prepareation of Large Area Al-ZnO Thin Film by DC MagnetronSputtering[J]. Spectroscopy and Spectral Analysis, 2009, 29(3): 698 Copy Citation Text

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[1] Tang Wanyi, Zhou Ming, Ren Naifei, Li Baojia, Zhang Wei. Surface Morphology and Optical Absorption of Femtosecond Laser Microstructured Silicon Coated with AZO Flim[J]. Chinese Journal of Lasers, 2011, 38(12): 1207001

JIAO Fei, LIAO Cheng, HAN Jun-feng, ZHOU Zhen. Prepareation of Large Area Al-ZnO Thin Film by DC MagnetronSputtering[J]. Spectroscopy and Spectral Analysis, 2009, 29(3): 698

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