Xiuhua Fu, Wenqi Liu, Shiping Yin, Kewu Liu, Dongmei Liu. Dual-Bandpass Filter in Infrared Thermal Imaging System for Methane Detection[J]. Acta Optica Sinica, 2018, 38(12): 1231001
- Acta Optica Sinica
- Vol. 38, Issue 12, 1231001 (2018)
Fig. 1. Structural diagram of detection system of methane
Fig. 2. Infrared adsorption spectrum of methane
Fig. 3. Transmittance curves of germanium wafer and silicon wafer
Fig. 4. Predesigned spectral curves of front layers. (a) 3-10 μm; (b) 3.7~6 μm
Fig. 5. Refractive index dispersion curves of ZnS under different process parameters
Fig. 6. Final theoretical spectral curves of front layers. (a) 3~10 μm; (b) 3.7~6 μm
Fig. 7. Theoretical spectral curves of back layers
Fig. 8. Layer sensitivity of back layers
Fig. 9. Theoretical spectral curves of double-side design
Fig. 10. Tested spectral curves of filter with front-surface-coated film
Fig. 11. Tested spectral curves of filter with double-side-coated film. (a) 3~10 μm; (b) 7~8.5 μm
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Table 1. Designed spectral parameters of filter
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Table 2. Process parameters
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