[2] Sokolova E A,Kalikmanov V I.Spectrometers consisting of a diffractive lens and a concave diffraction grating[J].Journal of Modern Optics,2004,51(14):2191-2201
[5] KELLER L D,JAFFE D,ERSHOV O A,et al.Fabrication and testing of chemically micromachined silicon echelle gratings[J].Appl.Opt,2000,39(7):1094-1105
[6] Syms Richard R A,Moore David F Optical MEMS for telecoms[J].Materials Today,2002,5(7-8):26-35