Author Affiliations
Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, Chinashow less
Fig. 1. Roadmap of wide application of optical freeform surface
[11] Fig. 2. Commercial measurement devices
[11] Fig. 3. Nanoscale CMM. (a) NMM-1 following the Abbe principle
[25]; (b) NMM-1 picture
[25]; (c) Isara 400 following the Abbe principle
[27]; (d) Isara 400 picture
[27] Fig. 4. Scanning methods with negligible force. (a) Working principle of AFM
[36]; (b) working principle of STM
[36] Fig. 5. Working principles of some measurement probes. (a) Multi-probe measurement scheme based on laser focus principle
[26];(b) microscope revolver with multiple probes
[26]; (c) working principle of UA3P-3000
[37] Fig. 6. Optical profile scanner. (a) Principle of multiwavelength interferometer
[38]; (b) structure of LuphoScan
[38]; (c) principle of chromatic confocal measurement
[39]; (d) structure of NANOMEFOS
[39] Fig. 7. CGH measurement. (a) Schematic of zero interference of freeform surface CGH
[48]; (b) design of Cat-eye CGH; (c) sample of Cat-eye CGH
Fig. 8. Subaperture measurement methods. (a) Schematic diagram of circular subaperture stitching interferometry
[54];(b) schematic diagram of TWI
[65] Fig. 9. Adaptive interferometry. (a) Schematic of DM adaptive interferometry
[71]; (b) interference experimental device based on DM
[71];(c) schematic of SLM-based adaptive interferometry
[72]; (d) SLM-based interference experimental device
[72] Fig. 10. Schematic diagram of phase deflectometry measurement
[77] Fig. 11. Shack-Hartmann measurement method. (a) Schematic of Shack-Hartmann measurement
[53]; (b) freeform surface measurement by Shack-Hartmann measurement method based on scanning
[90] Fig. 12. Measurement system based on point laser
[97] Fig. 13. Scanning electron microscope based on flying cutting machine
[101] Fig. 14. Schematic of Fizeau interferometer based on diamond turning machine
[94] Fig. 15. Surface measurement based on PMD
[108] Fig. 16. Intrinsic feature surface registration method
[132]. (a) Gaussian curvature of lens array; (b) measured results of MLA and f-theta; (c) surface error of microlens after registration; (d) mean curvature of sinusoidal surface array; (e) measured results of composite structure of cylinder and sinusoidal surfaces; (f) surface error of sinusoidal surface array after registration
Fig. 17. Fiducial-aided surface registration method
[134]. (a) Schematic of FA-CAD; (b) accuracy comparison of fiducial-aided registration and ICP
Fig. 18. Form deviation of integrated freeform surfaces after individual measurement and calibration
[169] Fig. 19. Measurement of integrated freeform surface
[171]. (a) Setup for shape and position measurement; (b) sample; (c) measurement result