Design and optimization of the XeCl excimer laser&#39;s stimuli circuit

[in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 34 >Issue 5 >Page 617 > Article

Infrared and Laser Engineering
Vol. 34, Issue 5, 617 (2005)

Design and optimization of the XeCl excimer laser's stimuli circuit

[in Chinese]^1、2 and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese]. Design and optimization of the XeCl excimer laser's stimuli circuit[J]. Infrared and Laser Engineering, 2005, 34(5): 617 Copy Citation Text

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References

[4] Roberts Thomaster L.Experiment studies of a CrF and ArF discharge laser[J].IEEE J,1978,QE-14(12):944-950.

CLP Journals

[1] Qin Juanjuan, Shao Jingzhen, Liu Fengjuan, Fang Xiaodong. Crystallization of amorphous Si films by excimer laser annealing[J]. Infrared and Laser Engineering, 2015, 44(3): 959

[in Chinese], [in Chinese]. Design and optimization of the XeCl excimer laser's stimuli circuit[J]. Infrared and Laser Engineering, 2005, 34(5): 617

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