Development and application of short wavelength infrared detectors (Invited)

Xu Ma; Yunxue Li; Runyu Huang; Haifeng Ye; Zepeng Hou; Yanli Shi

doi:10.3788/IRLA20210897

Journals >Infrared and Laser Engineering >Volume 51 >Issue 1 >Page 20210897 > Article

Infrared and Laser Engineering
Vol. 51, Issue 1, 20210897 (2022)

Development and application of short wavelength infrared detectors (Invited)

Xu Ma^1、2, Yunxue Li^1、2, Runyu Huang^1、2, Haifeng Ye^1、2, Zepeng Hou^1、2, and Yanli Shi^1、2、*

Author Affiliations

¹School of Physics and Astronomy, Yunnan University, Kunming 650091, China

²Key Lab of Quantum Information of Yunnan Province, Yunnan University, Kunming 650091, China

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DOI: 10.3788/IRLA20210897 Cite this Article

Xu Ma, Yunxue Li, Runyu Huang, Haifeng Ye, Zepeng Hou, Yanli Shi. Development and application of short wavelength infrared detectors (Invited)[J]. Infrared and Laser Engineering, 2022, 51(1): 20210897 Copy Citation Text

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Fig. 1. Quantum efficiency of the SUI product

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Fig. 2. Traditional flip chip bonding technology via indium (a) and SONY's copper-copper connection technology (b)

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Fig. 3. Quantum efficiency of SONY products

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Fig. 4. Structure of RTI diode

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Fig. 5. (a) Sea rainfall imaging; (b) Drug bottle label imaging; (c) Chip alignment marking; (d) Semiconductor crack detection

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Fig. 6. (a) TEM imaging of CQD structure; (b) ROIC integration

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Fig. 7. Thermal imaging and responsivity of short and medium wavelength at 77 K

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Imaging characteristics	Application fields
Based on room temperature target reflection imaging, clear details	Night vision imaging application
Fingerprint characteristics for substance identification	Spectral imaging
Eye safety laser 155X nm detection and positioning	Optical fiber detection, satellite internet
Thermal radiation imaging of high temperature targets	Missile plume detection
Strong ability to wear fog, haze, sand, smoke and glass	Imaging detection under harsh conditions
Camouflage recognition, wig, fake beard recognition	Anti-terrorism application
The water has strong absorption of short waves, and the water target has a large contrast	Maritime border security, early warning
Operation at or near room temperature, small size, light weight, low energy consumption	Apply to the cell-phone's imaging

Table 1. Imaging characteristics and application fields of SWIR

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Corporate name	Format	Spectral range/μm	Pitch/μm	Performance
SUI	640×512 1280×1024	0.7-1.7 0.5-1.7	12.5 12.5	The plane array frame frequency is 60 Hz Quantum efficiency （QE） ≥65% Pixel operability≥99% The detectivity in 60 Hz mode is 2.8×10¹³ cm·Hz^1/2·W⁻¹ROIC noise is 25 e⁻Dynamic range is 1850:1
SUI	1024×1 2048×1	0.8-1.7 0.99-1.61	25 10	Linear array （2048×1） maximum frame frequency is 12 kHz QE>70% Pixel operability is 99% Dynamic range (Low gain mode) >2100:1
Teledyne Princeton Instruments	640×512	0.9-1.7	20	NIRvana HS： QE>80% （1-1.6 μm ） Frame frequency is 250 Hz Dark current is 500 e⁻·pixel⁻¹·s⁻¹ @ −55 °C ROIC noise<60 e⁻
Teledyne Princeton Instruments	1024×1	0.8-1.7 0-2.2	25	Linear array QE>85% ROIC noise is 400 e⁻Minimum dark current is 5.7 ke⁻·pixel⁻¹·s⁻¹
Princeton Infrared Technologies	1280×1024	0.4-1.7	12	QE>75% （1-1.6 μm） ROIC noise<45 e⁻Maximum frame frequency is 100 Hz Dynamic range≥3000:1
Princeton Infrared Technologies	1024×1	0.4-1.7	12.5	Linear array ROIC noise<75 e⁻Dynamic range>6000:1
FILR	640×512	0.9-1.7 0.6-1.7	15	QE>60% Maximum frame frequency is 180 Hz Pixel operability is 99.8%
FILR	1920×1080	0.9-1.7	10	ROIC noise<30 e⁻（High gain mode） Frame frequency is 16 outputs≥120 Hz
Teledyne Technologies	512×1 1024×1	0.95-1.7	25 12.5	Frame frequency is 49 kHz QE (typical) is 66% Dark current<5 pA

Table 2. The latest development of SWIR companies in the US

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Product name	Format	Pitch/μm	Performance
WiDy SWIR 320	320×256	25	Frame frequency is 200 Hz QE is 70% Dynamic range is 120 dB
WiDy SenS 640	640×512	15	Frame frequency is 230 Hz QE>70% Maximum dynamic range is 120 dB
SenS 1280	1280×1024	10	Frame frequency is 60 Hz QE>85% Maximum dynamic range is 61 dB Dark current is 50 ke⁻·pixel⁻¹·s⁻¹ROIC noise<30 e⁻
HiPe SenS 640	640×512	15	Frame frequency is 230 Hz QE is 90% Dark current<1.5 ke⁻·pixel⁻¹·s⁻¹ @20 °C ROIC noise<30 e⁻
LiSa SWIR 2048	2048×1	7.5	Frame frequency is 60 kHz QE>85% Minimum ROIC noise is 250 e⁻

Table 3. The development of NIT SWIR products

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Product name	Cardinal 640	Cardinal 1280
Format	640×512	1280×1024
Pitch/μm	15	10
QE	>80%	>80%
Dark current/density @280 K	<1.5 nA/cm²	<1 fA
Frame frequency/Hz	350	150
Pixel operability	≥99.5%	>99.5%

Table 4. The performance of Cardinal series

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Product name	Format	Spectral range/μm	Pitch/μm	Performance
Bobcat-320-Gated	320×256	0.9-1.7	20	Frame frequency is 400 Hz，QE is 80% Dynamic range is 61 dB，ROIC noise is 60 e⁻Dark current is 190 ke⁻·pixel⁻¹·s⁻¹@200 mV, 288 K
Bobcat-640	640×512	0.5-1.7	20	Frame frequency is 100 Hz，QE is 80% Dynamic range is 60 dB，ROIC noise is 120 e⁻Dark current<100 ke⁻·pixel⁻¹·s⁻¹@150 mV, 288 K
Xeva-320	320×256	0.5-1.7	30	Frame frequency is 344 Hz，QE is 80% Dynamic range is 70 dB，ROIC noise is 150 e⁻Dark current<10 ke⁻·pixel⁻¹·s⁻¹@223 K
Cheetah-640	640×512	0.5-1.7	20	Frame frequency is 1730 Hz，QE is 80% Dynamic range is 60 dB，ROIC noise is 120 e⁻Dark current<100 ke⁻·pixel⁻¹·s⁻¹@150 mV, 288 K
Manx R	2048×1	0.9-1.7	12.5	Frame frequency is 256 kHz，QE is 80% Dynamic range is 69 dB，ROIC noise is 350 e⁻Dark current<1.6 Me⁻·pixel⁻¹·s⁻¹@100 mV, 293 K

Table 5. Xenics SWIR products

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Research unit	Format	Spectral range/μm	Performance
Shanghai Institute of Technical Physics, Chinese Academy of Sciences	1280×1024	0.9-1.7	Blind pixel rate<1% Response non-uniformity is 6.4% Dark current density>5 nAcm²@300 K Peak detectivity>5×10¹² cm·Hz^1/2·W⁻¹@300 K
	1024×32	0.9-2.2	Blind pixel rate is 0.44%， Response non-uniformity is 5.7%，QE is 81.7% (1.6 μm) Peak detectivity is 2.5×10¹² cm·Hz^1/2·W⁻¹@200 K
	1024×512	0.95-2.5	Peak detectivity is 8×10¹¹ cm·Hz^1/2·W⁻¹@200 K Response non-uniformity is 6% Frame frequency>250 Hz
	2560×2048	0.9-1.7	Blind pixel rate is 0.26% Response non-uniformity is 3.81% Peak detectivity is 1.11×10¹³ cm·Hz^1/2·W⁻¹
Guohui Optoelectronics	640×512	0.9-1.7	Pixel pitch is 15 μm，QE≥65% Detectivity≥5×10¹²cm·Hz^1/2·W⁻¹ROIC noise is 50 e⁻（High gain mode） Dynamic range is 120 dB （Logarithmic mode） Response non-uniformity<3% Pixel operability>99.5% Minimum frame frequency is 340 Hz
Guohui Optoelectronics	1280×1024	0.9-1.7	Pixel pitch is 15 μm Dark current density is 2.25 nA/cm²@25 ℃ Detectivity is 1.1×10¹³cm·Hz^1/2·W⁻¹ROIC noise is 48 e⁻QE is 88%@1.55 μm Pixel operability>99%^[29]
The 44 th Research Institute of China Electronics Technology Group Corporation	320×240	1.0-1.7	Peak detectivity is 6.7×10¹² cm·Hz^1/2·W⁻¹QE>65%
	256×1	0.9-1.7	Peak detectivity is 1.2×10¹² cm·Hz^1/2·W⁻¹Response non-uniformity is 3.87%
	256×1	0.9-2.4	Peak detectivity is 3.25×10¹⁰ cm·Hz^1/2·W⁻¹Response non-uniformity is 11%

Table 6. The research and development of short wavelength infrared detectors in some domestic research institutes

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