• Chinese Optics Letters
  • Vol. 7, Issue 3, 03180 (2009)
Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, and Tonglin Huo
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 1000842 State Key Lab of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 1300223 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029
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    DOI: 10.3788/COL20090703.0180 Cite this Article Set citation alerts
    Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, Tonglin Huo. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region[J]. Chinese Optics Letters, 2009, 7(3): 03180 Copy Citation Text show less
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    Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, Tonglin Huo. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region[J]. Chinese Optics Letters, 2009, 7(3): 03180
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