Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region

Hui Lin; Lichao Zhang; Chunshui Jin; Hongjun Zhou; Tonglin Huo

doi:10.3788/COL20090703.0180

Journals >Chinese Optics Letters >Volume 7 >Issue 3 >Page 03180 > Article

Chinese Optics Letters
Vol. 7, Issue 3, 03180 (2009)

Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region

Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, and Tonglin Huo

Author Affiliations

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 1000842 State Key Lab of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 1300223 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029

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DOI: 10.3788/COL20090703.0180 Cite this Article Set citation alerts

Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, Tonglin Huo. Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region[J]. Chinese Optics Letters, 2009, 7(3): 03180 Copy Citation Text

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