Anti-Interference Design of Monitoring System for Microelectronic Assembly Baking Equipment

YUAN Jiajun; MO Guitao; LI Jie

doi:10.13911/j.cnki.1004-3365.210429

Journals >Microelectronics >Volume 51 >Issue 6 >Page 900 > Article

Microelectronics
Vol. 51, Issue 6, 900 (2021)

Anti-Interference Design of Monitoring System for Microelectronic Assembly Baking Equipment

YUAN Jiajun, MO Guitao, and LI Jie

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[in Chinese]

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DOI: 10.13911/j.cnki.1004-3365.210429 Cite this Article

YUAN Jiajun, MO Guitao, LI Jie. Anti-Interference Design of Monitoring System for Microelectronic Assembly Baking Equipment[J]. Microelectronics, 2021, 51(6): 900 Copy Citation Text

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References

[1] LI G, LIU W H, ZHUANG S J, et al. Reflections on the anti-interference issue of the PLC control system ［C］ // Int Conf ITMSE. Hongkong, China. 2012: 488-492.

[2] ZHANG P Z, ZHAO H Y. Design of SCADA power distribution monitoring system based on PLC and configuration software ［C］ // Int Conf MEMS. Shanghai, China. 2012: 174-178.

YUAN Jiajun, MO Guitao, LI Jie. Anti-Interference Design of Monitoring System for Microelectronic Assembly Baking Equipment[J]. Microelectronics, 2021, 51(6): 900

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