Diamond-like carbon (DLC) films have been deposited by ultrashort pulsed excimer laser (KrF 248 nm, 500 fs, 10 mJ). The film depth is 0.5 μm, the growth rate is 0.3～0.4 μm/h, the microhardness is 55 GPa, the optical tansimittance is better than 93%(580 nm～3 μm)。 With the temporal and spatial emission spectra, the property of plasma plume generated by the ultrashort pulsed laser and its variation with the laser parameters have been investigated. The velocity of plasma plume is very high (1×107 cm/s), the duration is very short (200～300 ns), so the plasma flux is intensive and this is suitable to deposit DLC and other metestable material. We have used the ion probe to measure the plasma ion flux, the result is consistent with that of the emission spectra. Under different laser parameter, DLC films were deposited and the effect of laser parameter and plasma flux on the deposited film have been compared. The characteristic of the interaction of ultrashort pulse with the target and the formation of DLC by laser plasma have been discussed.