• Opto-Electronic Engineering
  • Vol. 42, Issue 1, 84 (2015)
ZHANG Shiyu*, HONG Xia, FANG Xu, and YE Hui
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2015.01.014 Cite this Article
    ZHANG Shiyu, HONG Xia, FANG Xu, YE Hui. Design of Silicon Based Germanium Metal-semiconductor-metal Photodetector with Asymmetric Area Electrodes[J]. Opto-Electronic Engineering, 2015, 42(1): 84 Copy Citation Text show less
    References

    [1] Ishikawa Y,Wada K,Liu J,et al. Strain-induced enhancement of near-infrared absorption in Ge epitaxial layers grown on Si substrate [J]. Journal of Applied Physics(S0021-8979),2005,98(1):013501.

    [2] Luryi S, Kastalsky A,Bean J C. New infrared detector on a silicon chip [J]. IEEE Transactions on Electron Devices(S0018-9383),1984,31(9):1135-1139.

    [3] Samavedam S,Currie M,Langdo T,et al. High-quality germanium photodiodes integrated on silicon substrates using optimized relaxed graded buffers [J]. Applied Physics Letters(S0003-6951),1998,73(15):2125-2127.

    [4] ANG Kah-Wee,YU Mingbin,ZHU Shiyang,et al. Novel NiGe MSM photodetector featuring asymmetrical Schottky barriers using sulfur Co-implantation and segregation [J]. IEEE Electron Device Letters(S0741-3106),2008,29(7):708-710.

    [5] Chui C O,Okyay A K,Saraswat K C. Effective dark current suppression with asymmetric MSM photodetectors in group IV semiconductors [J]. IEEE Photonics Technology Letters(S1041-1135),2003,15(11):1585-1587.

    [6] ZANG Hui,Lee S ,Loh W-Y, et al. Dark-current suppression in metal–germanium–metal photodetectors through dopant-segregation in NiGe—Schottky barrier [J]. IEEE Electron Device Letters(S0741-3106),2008,29(2):161-164.

    [7] Okyay A K,Chui C O,Saraswat K C. Leakage suppression by asymmetric area electrodes in metal-semiconductor-metal photodetectors [J]. Applied Physics Letters(S0003-6951),2006,88(6):063506-063506-063502.

    [8] Park J-H,Yu H-Y. Dark current suppression in an erbium–germanium–erbium photodetector with an asymmetric electrode area [J]. Optics Letters(S1539-4794),2011,36(7):1182-1184.

    [9] HUANGFU Yourui,ZHAN Wenbo,HONG Xia,et al. Heteroepitaxy of Ge on Si (001) with pits and windows transferred from free-standing porous alumina mask [J]. Nanotechnology(S0957-4484),2013,24(18):185302.

    [10] Rouvière M,Vivien L,Le Roux X,et al. Ultrahigh speed germanium-on-silicon-on-insulator photodetectors for 1.31 and 1.55 μm operation [J]. Applied Physics Letters(S0003-6951),2005,87(23):231109-231109-31103.

    [11] Vivien L,RouviRre M,FUdUli J-M,et al. High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide [J]. Optics Express(S1094-4087),2007,15(15):9843-9848.

    [12] Dimoulas A,Tsipas P,Sotiropoulos A,et al. Fermi-level pinning and charge neutrality level in germanium [J]. Applied Physics Letters(S0003-6951),2006,89(25):252110-252113.

    [13] Ikeda K,Maeda T,Takagi S-i. Characterization of platinum germanide/Ge (100) Schottky barrier height for Ge channel metal source/drain MOSFET [J]. Thin Solid Films(S0040-6090),2006,508(1):359-362.

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    [1] Linhua Gao, Yanxia Cui, Qiangbing Liang, Yanzhen Liu, Guohui Li, Mingming Fan, Yuying Hao. Research progress in metal-inorganic semiconductor-metal photodetectors[J]. Infrared and Laser Engineering, 2020, 49(8): 20201025

    ZHANG Shiyu, HONG Xia, FANG Xu, YE Hui. Design of Silicon Based Germanium Metal-semiconductor-metal Photodetector with Asymmetric Area Electrodes[J]. Opto-Electronic Engineering, 2015, 42(1): 84
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